Other

Gakuo Komatsubara

Masanobu Yamamoto

Setsuo Norioka

Mitsuru Koizumi

Naoki Date

Hiroshi Kawase

Jun Sasaki

Minoru Takeda

Yuichi Aki

Yoshihisa Miura

An electron beam irradiation system has a pumping block at an end of a microscope column of electron optics. The system has the rotary stage, the microscope column for directing an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.

System and method for electron beam irradiation

An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad connected to a vacuum chamber containing an electron beam column and in a condition that the static pressure floating pad is attached to a subject to be irradiated without contacting, and an electron beam irradiating the subject to be irradiated through an electron beam path of the static pressure floating pad , whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad is separated from the subject to be irradiated. A vacuum seal valve including a piston to open and close the electron beam path is provided within the static pressure floating pad . When the static pressure floating pad is separated from the subject , the vacuum seal valve is structured to be activated to close the electron beam path so as to prevent the air from flowing into the vacuum chamber . In this structure, the vacuum seal valve is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

Electron beam irradiation apparatus and electron beam irradiating method

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Tokyo, Japan

Gakuo Komatsubara