Integra Technologies Limited

Gabriele Formicone

A semiconductor power device including a base plate; an input lead; an output lead; a field effect transistor (FET) power die disposed over the base plate, wherein the FET power die includes a set of source fingers, a set of drain fingers, and a set of gate fingers disposed directly over an active region, wherein the gate fingers are configured to receive an input signal from the input lead, and wherein the FET power die is configured to process the input signal to generate an output signal at the drain fingers for routing to the output lead; and electrical conductors (wirebonds or ribbons) bonded to the source and/or drain directly over the active region of the FET power die. The electrical conductors produce additional thermal paths between the active region and the base plate for thermal management of the FET power die.

Semiconductor power device including wire or ribbon bonds over device active region

Disclosed is an RF power FET or HEMT including an electrically-conductive substrate, a grounding metallization layer disposed on a bottom surface of the electrically-conductive substrate, an active area comprising at least one cell including source, gate and drain electrodes disposed over a top surface of the electrically-conductive substrate, and an electrically-conductive shallow trench electrically connecting the source electrode to the grounding metallization layer by way of the electrically-conductive substrate. This configuration results in the effective RF ground being very close to the active area of the FET in order to reduce parasitic source inductance and resistance. This results in potentially higher gain, higher saturation point, higher 3-order intercept, more efficient combining of the input RF signal, and more efficient extraction of the output RF signal. Additional benefits include reduced process complexity, such as, reduced need for plated air bridges, via holes formation and plating, front and back lithography alignment.

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Chandler, AZ, United States of America

Gabriele Formicone