Stmicroelectronics S.r.l.

Maxim Integrated Products, Inc.

Hanking Electronics, Ltd.

Gabriele Cazzaniga

Luca Coronato

Luciano Prandi

Barbara Simoni

Sarah Zerbini

Federico Forte

Carlo Caminada

Giacomo Calcaterra

Igino Padovani

Leonardo Sala

Ivo Binda

Manuel Santoro

Demetre Kondylis

Antonio Molfese

Simone Sabatelli

Carmine Iascone

Luigi Esposito

An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Microelectromechanical structure with enhanced rejection of acceleration noise

The invention relates to a sensor system, and more particularly, to systems, devices and methods of processing a sensing signal from a sensor to generate amplitude and phase controls for driving this sensor in a controlled manner and enabling synchronized operation of the sensor system. A signal processor in the sensor system comprises a sensor readout circuit, an amplitude controller and a phase controller. A subset of functional blocks in the signal processor may alternate between active and inactive power saving durations. During the active power saving durations, the subset of functional blocks are powered off or functionally disabled to conserve power consumption. The amplitude and phase controls are latched for the purposes of properly maintaining the driving signal and the system clock. During the subsequent inactive power saving durations, the subset of functional blocks return to normal operation to refresh the amplitude and phase controls.

Spot mode functionality for power saving in a sensor system

An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Integrated microelectromechanical gyroscope with improved driving structure

The present invention relates to a signal processor, and more particularly, to systems, devices and methods of using a comprehensive sensor fusion algorithm to integrate sensor data collected by accelerometers, gyroscopes and magnetometers. The signal processor dynamically applies a Complementary Filter to merge a rotation based gyro output and a FQA output that is obtained by combining acceleration rates and magnetic field magnitudes. Therefore, motion information is derived to generate a motion control signal. Such a comprehensive sensor fusion algorithm significantly reduces the complexity of computation, and the power and area overhead is controlled. As a result, the signal processor may be implemented based on local computation capability of a sensor system, and its integration within such a sensor system is made possible without relying on an external microprocessor.

Comprehensive sensor fusion algorithm

The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

Micro rate of rotation sensor and method for operating a micro rate of rotation sensor

Various embodiments of the invention provide for automatic, real-time bias detection and error compensation in inertial MEMS sensors often used in handheld devices. Real-time bias correction provides for computational advantages that lead to optimized gyroscope performance without negatively affecting user experience. In various embodiments, bias non-idealities are compensated by utilizing raw output data from the gyroscope itself without relying on additional external sensors.

Systems and methods to reduce sensor bias

Various embodiments of the invention allow to cancel demodulation phase error. In certain embodiments, cancellation is accomplished by determining the phase delay of a drive front end signal that is in phase with an undesired signal and digitally adjusting the demodulation signal with a calibrated signal. The phase delay may be adaptively compensated during regular circuit operation, only at predetermined times, or during a factory calibration.

Adaptive phase delay adjustment for MEMS sensors

Various embodiments of the invention reduce stiction in a wide range of MEMS devices and increase device reliability without negatively impacting performance. In certain embodiments, stiction recover is accomplished by applying electrostatic forces to electrodes via optimized voltage signals that generate a restoring force that aids in overcoming stiction forces between electrodes. The voltage signals used within a stiction recovery procedure may be static or a dynamic, and may be applied directly to existing electrodes within a MEMS device, thereby, eliminating the need for additional components. In some embodiments, the voltage is estimated or calibrated and swept through a range of frequencies that contains one or more resonant frequencies of the mechanical structure that comprises the parts to be detached.

Recovery system and methods for MEMS devices

Various embodiments of the invention provide for improved performance by reducing a quadrature error signal. In certain embodiments, this is accomplished by using a mixed-signal architecture comprising analog and digital circuit components in a closed-loop configuration that generates from a detected quadrature error signal a calibration quadrature signal that is then compensated at a virtual ground of an analog front end circuit. Some embodiments allow for pre-calibration for quadrature error and/or adaptive compensation of unwanted drift effects of the quadrature error, including temperature drifts.

Systems and methods to reduce quadrature error in sensors

An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Microelectromechanical gyroscope with rotary driving motion and improved electrical properties

This invention relates generally to semiconductor manufacturing and packaging and more specifically to semiconductor manufacturing in MEMS (Microelectromechanical systems) inertial sensing products. Embodiments of the present invention improve pressure sensor performance (e.g., absolute and relative accuracy) by increasing pressure insensitivity to changes in thermo-mechanical stress. The pressure insensitivity can be achieved by using the array of pressure sensing membranes, suspended sensing electrodes, and dielectric anchors.

MEMS pressure sensor with improved insensitivity to thermo-mechanical stress

The invention relates to a controller, and more particularly, to systems, devices and methods of processing multiple sensor signals of a gyroscope. The signal processor includes: a front end amplifier for converting a signal into a voltage variation signal; at least one analog-to-digital converter coupled to the front end amplifier and operative to convert an analog signal into a digital signal; and at least one demodulator coupled to the analog-to-digital converter and operative to demodulate the digital signal to thereby extract an envelope signal therefrom.

Innovative angular sensor read-out multi-axes digital front-end chain

An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

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Rosate, Italy

Gabriele Cazzaniga