Infineon Technologies Ag

Gabriele Bosetti

Christian Bretthauer

Andreas Bogner

Niccoló De Milleri

A piezoelectric transducer comprises a deflectable structure having a first portion and a laterally adjoining second portion. The first portion has a piezoelectric layer and the second portion has an insulating material layer, and the second portion has a higher rigidity and a smaller mass per unit area than the first portion.

Piezoelectric transducer

A MEMS device and a method for operating a MEMS device are provided. The MEMS device comprises a piezoelectric transducer element having at least a first piezoelectric transducer region and a deflectable structure, wherein the deflectable structure comprises the piezoelectric transducer element. The MEMS device further comprises a control circuitry configured to readout at least a first sensor signal from the first region of the piezoelectric transducer element based on a deflection of the deflectable structure. The control circuitry is further configured to determine a control signal from the readout first sensor signal, wherein the control signal has a counteracting effect to the deflection of the deflectable structure when provided to the piezoelectric transducer element. The control circuitry is configured to provide the control signal to the piezoelectric transducer element for counteracting the deflection of the deflectable structure.

MEMS device and method for operating a MEMS device

A Micro-Electro-Mechanical System (MEMS) device comprises a piezoelectric transducer having a first frequency behavior, wherein the piezoelectric transducer comprises a piezoelectric trimming region, and control circuitry to provide a bias signal to the piezoelectric trimming region of the piezoelectric transducer for adjusting a second frequency behavior of the piezoelectric transducer.

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Munich, Germany

Gabriele Bosetti