At&t Bell Laboratories

Bell Telephone Laboratories

Lucent Technologies Inc.

At+t Corp.

American Telephone & Telegraph Co., At&t Bell Laboratories

Western Electric Company, Inc.

Gabriel L Miller

Eric R Wagner

Robert A Boie

Ratnaji R Kola

Joseph E Griffith

Henry Ignatius Smith

George K Celler

Sergey Luryi

Charles E Bryson, Iii

Joseph Henry Condon

Robert A Kubli

Charles W Jurgensen

David Arthur Robinson

John Duncan Wiley

Alan T English

David A Robinson

In a capacitor microphone system for directional applications, an array of backplates of microphone cells are formed on a printed circuit (PC) board. A continuous strip of diaphragm is employed to cover each backplate. The diaphragm is stretched to create a uniform tension along its length, contributing to the objective of achieving a uniform gain by each microphone cell. In addition, the diaphragm is separated from the backplates by a relatively large distance such that the percentage deviation from such a distance from cell to cell is relatively small, again contributing to the objective of gain uniformity.

Directional capacitor microphone system

A scanning probe microscope equipped with a mechanism for exchanging a probe balance beam from the scan head, wherein the probe balance beam is of the type which is magnetically constrained on the scan head. A magnet having a magnetic field strength greater than that of the scan head magnet is utilized to overcome the attractive force exerted on the balance beam by the scan head magnet and transfer the balance beam from the scan head to a plate in a holding station on the sample table of the microscope. Completely automatic operation is achieved without operator handling of the balance beam.

Mechanism for changing a probe balance beam in a scanning probe

A system for monitoring the integrity of electrical connections includes a transformer with its primary coupled across a dual split contact arrangement and the secondary coupled to both an energy source and a monitoring circuit. When the contact condition is made the secondary impedance reaches a given value which results in a low output indicated by the monitoring circuit. The energy source is preferably a radio frequency oscillator driving the transformer secondary, which is also connected to a monitoring circuit. Preferably, the output from a current reference circuit, coupled to the secondary of the transformer, is coupled to the energy source circuit and the monitoring circuit so as to produce a given output in the monitoring circuit when the contact condition is made.

System for continuously monitoring the integrity of an electrical

A circuit for driving light emitting diodes with a precise amount of current in response to an input pulse is disclosed. The input pulse drives a transistor into saturation, and the collector current of this transistor is increased in value through the use of two cascaded multiplying current mirrors. The second current mirror directly drives the light emitting diodes.

Cascaded multiplying current mirror driver for LED's

X-ray masks are typically made by depositing and patterning a layer of heavy metal on a thin supporting membrane. The metal layer must have a relatively low and uniform stress to prevent stress-induced deformation of the pattern. Tungsten films having excellent stress characteristics are produced by employing a continuously operating capacitance-based measurement technique to allow adjustment of the deposition conditions in rapid response to changes in stress of the film being deposited. The stress gradients in the film are further reduced by transferring heat from the membrane as the metal is deposited thereon.

Reduced stress tungsten deposition

A circuit that prevents optical screening systems from being pinned in an inoperative state under certain light conditions. The invention accomplishes this by using a circuit comprising a photodetector for converting scattered light from a visual code (e.g., universal product code) into current and a current limiting circuit coupled to the photodetector for limiting the current capable of passing through the photodetector.

Optical scanner

X-ray masks are typically made by depositing and patterning a layer of heavy metal on a thin supporting membrane. The metal layer must have a relatively low stress to prevent stress-induced deformation of the pattern. Tungsten films having excellent stress characteristics are produced by employing a continuously operating capacitance-based measurement technique to allow adjustment of the deposition conditions in rapid response to changes in stress of the film being deposited.

Apparatus for depositing low stress films

A photodetector circuit is disclosed which can extract a carrier frequency signal from an optical beam. A photodiode is back-biased by a voltage supply, and the capacitance of the photodiode is dependent on the value of its back-bias potential. The photodiode is connected in parallel resonance with an inductor, and the parallel resonant combination is connected to the input of an inverting amplifier having a feedback capacitor. This feedback capacitor causes a capacitive component to appear in the input impedance of the amplifier which combines with the photodiode capacitance and the inductor to provide a parallel resonant tank circuit. The amplifier has a change in gain versus change in power supply characteristic. By selecting the value of the feedback capacitor, changes in the capacitive component of the input impedance are equal and opposite to changes in the capacitance of the photodiode, and the resonant frequency of the tank circuit is thereby essentially unaffected by changes in the supply voltage. A resistive element is added to the feedback impedance in order to lower the Q of the tank circuit to accommodate input signals having broader bandwidth. A frequency selective amplifying stage is added after the amplifier to help remove much lower frequency optical interference that is passed by the amplifier due to the broader bandwidth.

Photodetector circuit with actively damped tuned input

A battery feed circuit for supplying DC power to a telephone loop and for coupling signals to and from said loop is disclosed. A differential amplifier having its inputs connected by way of a twisted resistive bridge to the telephone loop provides a voltage at its output which includes the signal from said telephone loop and has a DC component which is proportional to the DC current flowing in the loop. Signals are coupled to the telephone loop by a low-inductance three-winding transformer which has two of its windings connected in series with an external power supply and the twisted bridge in order to supply current to the telephone loop. A second differential amplifier is connected in different ways in several embodiments between the output of the first differential amplifier and the third winding of the transformer to provide an automatic flux-cancelling action in order to avoid saturation of the transformer core. Larger gain is achieved in the first differential amplifier by clamping its DC output to zero through use of an integrator circuit connected between the output and one of the inputs of the first differential amplifier. In one of the embodiments, power is supplied to the telephone loop by a constant current source.

Battery feed for telephone line cards

Process for reduced stress tungsten deposition

Capacitive proximity sensors are disclosed that can be fabricated in different shapes, sizes and materials used in a wide variety of applications. Each such sensor includes a sensing electrode and a guard electrode. The sensor electrode and guard electrode can be parallel conductors separated by an insulating layer, such as a double-sided circuit board shaped to suit the application. One such sensor is transparent for use in conjunction with an optical bar-code scanner. Another sensor is annular in shape for use in conjunction with a telephone transmitter. The sensing electrode and the guard electrode are driven in unison by an RF signal. The proximity of an object to the sensor is observed by detecting changes in the RF current flowing through the sensing electrode caused by the proximity of an object to the sensing electrode.

Capacitive proximity sensors

In accordance with the present invention, a silicon device fabricated on a (100) silicon substrate is provided with a (111) slant surface and an electrical contact comprising epitaxial low Schottky barrier silicide is formed on the (111) surface. For example, low resistance rare earth silicide contacts on V-groove surfaces are provided for the source and drain contacts of a field effect transistor. The resulting high quality contact permits downward scaling of the source and drain junction depths. As another example, rare earth silicide Schottky contacts are epitaxially grown on V-groove surfaces to provide low voltage rectifiers having both low power dissipation under forward bias and low reverse-bias leakage current.

Semiconductor devices using epitaxial silicides on (111) surfaces etched

A force-sensing system suitable, for example, for atomic force microscopy. This system includes a rocking beam, a base, and means for supporting the beam adjacent a surface of the base such that the beam can pivot about at least one axis parallel to the base surface. In contrast to rocking-beam systems of the prior art, the support means comprise at least one pivot element that can be held against the base surface by a magnetic field.

Force-sensing system, including a magnetically mounted rocking element

Slurry in a slurry polisher is ultrasonically agitated during polishing to dislodge embedded debris and grit from the polishing pad and thereby improve the uniformity of material removal, lengthen the life of the pad and avoid scratches and defects on the surface being polished. The method is particularly useful for applications in which slurry polishing is used for planarizing deposited layers on semiconductor wafers where non-uniformities caused by such embedded material can affect process yields. Apparatus is disclosed for applying ultrasonic energy to the slurry so that such energy is focussed on the pad.

Slurry polisher using ultrasonic agitation

A force balancing method and apparatus detects small changes in force or pressure. An LC tuned circuit having a capacitor with at least one movable plate senses force or pressure changes. Deviations in the phase of the response of the tuned circuit are compared to the phase of a driving reference oscillator to generate an error signal. The error signal is used to control the oscillator to increase or decrease its output amplitude for driving the tuned circuit. As a result the electrostatic force across the capacitor plates tends to change in such a way as to precisely balance the effect of external force or pressure changes. The system therefore operates in a force-balance mode and in such a way as to provide a high sensitivity together with a precisely controlled stiffness. This system is particularly applicable to high sensitivity microphones, micro-topography, and atomic force microscopy.

Growing community of inventors

Westfield, NJ, United States of America

Gabriel L Miller