X-fab Semiconductor Foundries Ag

Texas Instruments Corporation

X-celeprint Limited

Gabriel Kittler

Ralf Lerner

Ronald S Cok

Christopher Andrew Bower

Phil Hower

Klaus Schottmann

William Andrew Nevin

A semiconductor structure suitable for micro-transfer printing includes a semiconductor substrate and a patterned insulation layer disposed on or over the semiconductor substrate. The insulation layer pattern forms one or more etch vias in contact with the semiconductor substrate. Each etch via is exposed. A semiconductor device is disposed on the patterned insulation layer and is surrounded by an isolation material in one or more isolation vias that are adjacent to the etch via. The etch via can be at least partially filled with a semiconductor material that is etchable with a common etchant as the semiconductor substrate. Alternatively, the etch via is empty and the semiconductor substrate is patterned to form a gap that separates at least a part of the semiconductor device from the semiconductor substrate and forms a tether physically connecting the semiconductor device to an anchor portion of the semiconductor substrate or the patterned insulation layer.

Isolation structure for micro-transfer-printable devices

A depletion type DMOS transistor comprises a gap in electrode material allowing incorporation of a well dopant species into the underlying semiconductor material. During subsequent dopant diffusion a continuous well region is obtained having an extended lateral extension without having an increased depth. The source dopant species is implanted after masking the gap. Additional channel implantation is performed prior to forming the gate dielectric material.

DMOS transistor having an increased breakdown voltage and method for production

The invention relates to a method for producing silicon semiconductor wafers and components having layer structures of III-V layers for integrating III-V semiconductor components. The method employs SOI silicon semiconductor wafers having varying substrate orientations, and the III-V semiconductor layers are produced in trenches () produced by etching within certain regions (), which are electrically insulated from each other, of the active semiconductor layer () by means of a cover layer or cover layers () using MOCVD methods.

Method for producing silicon semiconductor wafers comprising a layer for integrating III-V semiconductor components

The invention describes a method for fabricating silicon semiconductor wafers with the layer structures from III-V semiconductor layers for the integration of HEMTs based on semiconductor III-V layers with silicon components. SOI silicon semiconductor wafers are used, the active semiconductor layer of which has the III-V semiconductor layers () of the HEMT design () placed on it stretching over two mutually insulated regions () of the active silicon layer. An appropriate layer arrangement is likewise disclosed.

Growing community of inventors

Ilmenau, Germany

Gabriel Kittler