Asml Masktools B.v.

Mentor Graphics Corporation

Gabriel Berger

Jang Fung Chen

Tamer Coskun

Sangbong Park

SangBong Park

Ting Chen

A method and apparatus for generating a source illuminator profile and a mask design, subsequently optimizing the source illuminator profile and mask design based upon a set of target intensity profiles. In various implementations, the Lagrange method of optimization is employed to optimize the radiation source, wherein an optimum intensity for each pixel of the source is determined. Subsequently, a continuous tone mask is generated based upon the diffraction orders of the optimized source. With various implementations, the target intensity profile is generated by deriving a set of band limited target frequencies corresponding to the optical lithographic system. Subsequently, homotopy methods may be employed to optimize the source illuminator profile and the continuous tone mask based upon the set of band limited target frequencies.

Source mask optimization for microcircuit design

A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.

Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process

Improved calibration of a resist model used in critical dimension (CD) calculation is disclosed. A dose function is obtained based on optical tool to be used form the resist on a wafer. The dose function indicates the amount of energy in a resist. The dose function is convolved with a convolution kernel to obtain a modified dose function. The convolution kernel has variable diffusion lengths in different directions. The convolution kernel may include multiple Gaussian kernels each having variable diffusion lengths in different directions. The modified dose function is converted into a CD value which is compared with a target value. If necessary, the diffusion lengths of the Gaussian kernels are adjusted based on the comparison result.

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Cupertino, CA, United States of America

Gabriel Berger