Intel Corporation

Gabel Chong

Tsung-Ein Tsai

Achintya K Bhowmik

Junnarker Mahesh

Michael P Skinner

Bidhan P Chaudhuri

Chan H Yoo

Mahmood Toofan

A thermo-optical device may use a heater to tune an optical device such as an optical switch, a Mach-Zehnder interferometer, or a variable optical attenuator, to mention a few examples. In some embodiments, polarization-dependent losses caused by the heating and power efficiency may be improved by defining a clad core including an optical core and cladding material on a substrate and covering the clad core on three sides with a heater.

Heating optical devices

An optical network may include a detector for detecting the power of each of a plurality of channels of a wavelength division multiplexed optical signal in one embodiment of the present invention. Each channel may be conveyed to an interface underneath a detector by way of a core formed in the substrate. The interface may include a trench with one side surface angled to form a reflector to reflect light upwardly to be detected by the detector. Other surfaces of said trench may also be reflective to reduce the cross talk between adjacent channels.

Monitoring power in optical networks

Optical waveguides with power monitoring or optical detection capabilities are disclosed. The waveguide includes a lower cladding, a core disposed on the lower cladding, an upper cladding disposed on the core and a trench extending transversely through a distal end of the lower cladding, core and upper cladding. The trench includes a distal wall that provides a reflective surface disposed at an angle relative to the end of the core of greater than 90&#xb0;. A detector is disposed above the trench for receiving a reflected light beam off of the reflective surface. Various methods of manufacturing these devices are also disclosed.

Waveguides with optical monitoring

A method for fabricating a three-dimensional tapered optical waveguide and a three-dimensional tapered optical waveguide are shown and described. The fabrication method takes advantage of RIE lag to create a shaped trench in a lower cladding layer that has one end that is wider and deeper and than the opposite end. After the trench is filled with core material, a second RIE process is carried out which takes advantage of reverse RIE lag to etch the core material at a faster rate at the shallower and narrower end and at a slower rate at the wider and deeper end. The result is shaped core of a three-dimensional tapered optical waveguide that is wider and deeper at one end and tapers towards a shallower and narrower end for improved optical signal transmission.

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Mountain View, CA, United States of America

Gabel Chong