Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semes Co., Ltd. (1 from 783 patents)
1 patent:
1. 12181504 - Apparatus and method for inspecting electrostatic chuck