New Sd, Inc.

Bei-systron Donner

G Richard Newell

Bert David Egley

Scott D Orlosky

Kenneth S Lewallen

Richard A Hanson

Piyush K Gupta

Accelerometer and method in which parts such as the seismic mass and force sensors are all fabricated of a single material such as crystalline quartz and bonded together in a manner which reduces the possibility of creep between them. Damping plates and squeeze film gas damping dampen movement of the seismic mass, and the parts are oriented in a predetermined manner relative to the crystallographic axes of the wafers from which they are fabricated to control the character of breakaway tabs which hold the parts to the wafers during fabrication.

Accelerometer and method of manufacture

Mechanical resonator and method in which electrodes or other driving and sensing elements are energized with an AC voltage to produce oscillations in a tine. The electrodes or other driving and sensing elements have at least two parameters which are adjusted to selectively enhance oscillations in one mode, e.g. the fundamental mode, and/or to selectively suppress oscillations in one or more other modes, e.g. an overtone mode. The parameters which can be adjusted include the endpoints of electrodes, the width of a gap between adjacent ends of electrodes, and corresponding features of other driving and sensing elements.

Single mode resonator and method

Proofmass assembly for an accelerometer having transducers fabricated of crystalline quartz and other components fabricated of fused quartz. The assembly includes a main support, a frame pivotally connected to the support for pendulous movement about a hinge axis such that the frame moves with a component of motion along the sensing axis of the accelerometer, a proofmass connected to the frame for movement about a compensation axis spaced from and generally parallel to the hinge axis, and a pair of transducers connected between the proofmass and the support for sensing forces produced by acceleration of the proofmass along the sensing axis. Differences in thermal expansion between the transducers and the fused quartz components are taken up by rotation of the proofmass about the compensation axis, and the two parallel axes permit translational motion of the proofmass in response to acceleration along the sensing axis without rotation of the proofmass relative to the support.

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Alamo, CA, United States of America

G Richard Newell