Ebara Corporation

Fuyuki Ogaki

Osamu Shimizu

Junji Kunisawa

Yusuke Watanabe

Keisuke Ikeda

Hisajiro Nakano

Michiaki Matsuda

Yuji Hiroto

A cleaning device includes: a plurality of rollers that hold a peripheral edge part of a substrate; a rotation driving unit that rotates the substrate by rotationally driving the plurality of rollers; a cleaning member that abuts on the substrate and cleans the substrate; a cleaning liquid supply nozzle that supplies a cleaning liquid to the substrate; a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers; and a rotation speed calculation unit that calculates a rotation speed of the substrate on the basis of the sound detected by the microphone.

Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device

The present invention provides a check valve for use in a vacuum sewage pipe. The check valve includes a body having a sewage inlet and a sewage outlet to be coupled to the vacuum sewage pipe, a flap valve element disposed in the body and rotatably supported by a first shaft, and a closing mechanism. The closing mechanism can keep the flap valve element in a closed state so as to allow the flap valve element to function as a gate valve. The closing mechanism can also limit an opening degree of the flap valve element so as to allow the flap valve element to function as a check valve.

Check valve for vacuum sewage pipe and vacuum sewage system

Growing community of inventors

Hokkaido, Japan

Fuyuki Ogaki