Other

Nikon Corporation

Fusao Shimizu

Atsuhiro Fujii

A shape measurement device includes: a stage for loading a subject for measurement; an imaging section that forms an image of the subject for measurement; and a shifting section that implements relative shifting between the imaging section and the subject for measurement to shift the imaging section to a position corresponding to a portion on the subject for measurement which is to be measured, and the shifting section implements the relative shifting by shifting the imaging section without shifting the stage.

Shape measurement device

A carrier shape measurement device includes: a stage which supports a carrier which is to be a subject of measurement; and a measurement section which measures a shape of the carrier, and the stage comprises kinematic coupling pins to support the carrier by a kinematic coupling.

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Fujisawa, Japan

Fusao Shimizu