Disco Corporation

Fumiya Kawano

Hiroshi Morikazu

Noboru Takeda

Tasuku Koyanagi

A manufacturing method of a plate-shaped object includes a shield tunnel forming step of forming plural shield tunnels in a plate-shaped workpiece formed of a hard material and an etching step of etching the shield tunnels by an etchant. The plate-shaped object is capable of being bent by an external force. In the shield tunnel forming step, plural shield tunnels are formed in a first shield tunnel region having a first length along a line-shaped first processing-planned region set on one surface of the workpiece, and plural shield tunnels are formed in a second shield tunnel region having a second length along a line-shaped second processing-planned region that is different from a region on an extension line of the first processing-planned region and is adjacent to the first processing-planned region on the one surface.

Manufacturing method of plate-shaped object

A comparing method includes a processing trace forming step of positioning a condenser at a reference height and a plurality of heights by moving the condenser, and forming a plurality of processing traces in one surface of a workpiece by irradiating different positions of the one surface with a laser beam according to each of the heights, a calculating step of calculating at least one of an average of widths in a plurality of predetermined directions of each of the plurality of processing traces and an area ratio of each of the plurality of processing traces to a circle of a predetermined diameter by analyzing an image of the plurality of processing traces by an image analyzing section, and a comparing step of quantitatively comparing deviations of the plurality of processing traces from a predetermined shape on the basis of at least one of the average and the area ratio.

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Tokyo, Japan

Fumiya Kawano