Seiko Epson Corporation

Fumitaka Kitamura

Hideo Tanaya

Junichiro Sakata

Tsukasa Funasaka

Kazushige Umetsu

Kazuto Yoshimura

Hiroyuki Ogiso

Shuuichi Iguchi

A vibratory structure includes: a first X-cut crystal substrate; a second X-cut crystal substrate stacked on the first X-cut crystal substrate so that the x-axis of the second X-cut crystal substrate is parallel to the x-axis of the first X-cut crystal substrate; a base formed by the first X-cut crystal substrate and the second X-cut crystal substrate; and vibratory arm sections formed so as to be integrated together with the base in one body, and protruding from the base.

Vibrator comprising two X-cut crystal substrates with an intermediate electrode

A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.

Method for manufacturing a piezoelectric resonator

The invention provides a resonator piece, a resonator, an oscillator and an electronic device that can prevent in advance defects from arising in the electrodes and whose frequency characteristics of the resonator piece and CI value are stable. The resonator piece can include a base portion in which a base portion electrode portion is formed, resonating arm portions, groove portions including groove electrode portions, side surface electrode portions, groove electrode-use connection electrode portions, and side surface electrode-use connection electrode portions. The width of the base portion side of openings of the groove portions is formed narrower than the width of other portions, with connection electrode disposition portions for disposing the groove electrode-use connection electrode portions or the side surface electrode-use connection electrode portions being formed near the narrowly formed openings of the groove portions, and the shapes of the openings of the groove portions are formed so as to be substantially symmetrical with respect to hypothetical lines disposed along the longitudinal direction at width-direction centers of the groove portions.

Resonator piece, resonator, oscillator and electronic device

A vibrating piece in which a CI values ratio is maintained constant while minimizing the CI value of the fundamental wave, variations of the CI values between the vibrating piece devices are reduced even if the base is made short, and the entire vibrating piece can be made smaller.

Vibrating piece, vibrator, oscillator, and electronic device

A vibrating reed which includes a base; and a vibration arm section formed so as to protrude from this base wherein a through groove is formed in the vibration arm section, and a rigidity reinforcing section is provided in the through groove, and thus the frequency is not decreased and the CI value is not increased.

Vibrating reed, vibrator, oscillator, and electronic device

A vibrating piece in which a CI value ratio is maintained constant while minimizing the CI value of the fundamental wave so that variations of the CI values between the vibrating piece devices are reduced even if the base is made short, and the entire vibrating piece can be made smaller.

A vibrating reed is provided which includes a base; and a vibration arm section formed so as to protrude from this base, a grooved portion is formed in one of the obverse surface and the rear surface of the vibration arm section, and a groove electrode portion and a side electrode portion is formed in the grooved portion and the side portion of the vibration arm section, respectively, wherein a short-circuit prevention section is formed between the groove electrode portion and the side electrode portion and thus vibration failure is made unlikely to occur while minimizing the CI value.

Vibrating reed, vibrator, oscillator and electronic device

A vibrating reed includes a base; and a vibration arm section formed so as to protrude from this base wherein a through groove is formed in the vibration arm section, and a rigidity reinforcing section is provided in the through groove, and thus the frequency is not decreased and the CI value is not increased.

A vibrating piece comprises a base and vibrating arms formed protruding from the base, wherein a groove is formed on at least one of the front side and rear side of the vibrating arms, and wherein notches are formed in the base.

Growing community of inventors

Suwa, Japan

Fumitaka Kitamura