Fujitsu Corporation

Other

Fumio Tabata

Kazuo Asakawa

Hidenori Sekiguchi

Yuji Sakata

Fumiaki Akiya

Toshiro Higuchi

Hitoshi Komoriya

Katsuhide Natori

Toru Kamada

Saku Egawa

Toshiki Niino

Electrostatic actuator and method of controlling the same

It is an object of the present invention to provide a circuit board trimming apparatus and method used, in which apparatus and method a wiring pattern on a printed circuit board is trimmed, and to provide a circuit board trimming apparatus and method, in which apparatus and method a wiring pattern is trimmed efficiently while damage to the circuit board is minimized. A force exerted by a cutter against the circuit board is measured when the wiring pattern is cut by pressing an ultrasonic cutter against the wiring pattern on the circuit board and by moving the circuit board and the cutter relative to each other, a shape of the wiring pattern being determined on the basis of the force thus measured and a cutting process being controlled in accordance with the shape of the wiring pattern.

Circuit board trimming apparatus and method

A supporting device comprising a first member which supports a springy means for resiliently supporting a second member. The supporting device comprises a detection means for detecting displacement of the springy means with respect to the first member in accordance with the movement of the second member and a biasing means which applies a force to the springy means from the same direction as or from a direction opposite to that of the displacement for changing the elasticity of the springy means in accordance with the movement of the second member.

Supporting device

A vertical stepper transfers a circuit pattern formed on a mask onto a wafer using synchrotron radiation instead of a light source. The vertical stepper includes a wafer stage for having the wafer mounted thereon in the vertical direction and a mask stage for having the mask mounted thereon in the vertical direction. The wafer stage includes a coarse X-Y stage, a transfer member, and a wafer mounting member. The wafer mounting member is provided with a fine X-Y stage. The wafer mounting member is moved in the horizontal direction between a first position mounted on the coarse X-Y stage and a second position mounted on the mask stage by the transfer member. When exposed to the synchrotron radiation, the wafer mounting member is integrated with the mask stage. After the wafer and the mask are strictly correctly positioned by the fine X-Y stage, the wafer mounting member, integrated with the mask stage, is stepped and repeat exposed by scanning in the vertical direction.

Vertical stepper

A supporting device including a first member which supports a springy means for resiliently supporting a second member. The supporting device includes a detection for detecting displacements of the springy with respect to the first member in accordance with the movement of the second member and a biasing which applies a force to the springy from the same direction as or from a direction opposite to that of the displacement for changing the elasticity of the springy in accordance with the movement of the second member.

A method for controlling the locus of an arm of an arm type robot or the like, wherein a control system which drives a first arm of a two-joint arm under open-loop control and a second arm under feedback control is provided. A bang-bang drive system is used for positioning the first arm in a minimum time. The position of the tip of the second arm can be detected either from the rotational angle of each arm or by means of a position recognizing device. Furthermore, an arm positioning method for rapidly bringing the tip of a multi-joint arm to a desired position while detecting the positions of its tip and its joints by simple calculations is disclosed.

Growing community of inventors

Yokohama, Japan

Fumio Tabata