Kabushiki Kaisha Toshiba

Nec Corporation

Nuflare Technology, Inc.

Fumio Ozaki

Hirokazu Sato

Junji Oaki

Hideaki Hashimoto

Hideo Tsuchiya

Seiji Tokura

Yasuhiko Suzuki

Hisashi Hayashi

Nobuto Matsuhira

Junji Ooaki

The entire surface of a photomaskis inspected after data and parameters of the lithography simulator are set in the operation setting screen of a control computerand after the inspection systemis calibrated. The coordinates of a portion or portions determined in the inspection to be a defect are written into an XML file. When the inspection systemis in the die-to-database inspection mode, the control computerreads pattern data from the database, which data is used by the inspection systemto generate reference data, and then converts the read pattern data into OASIS format, which is highly versatile. The optical image captured by the inspection systemis converted into a bitmap. These data are sent to the lithography simulator, together with simulation operating conditions and the image data that was used to calibrate the inspection system

Inspection system

A mobile robot includes: a main body; a drive unit that moves the main body; a contact force detecting unit that detects a contact force acting against an obstacle; and a controller that controls the drive unit to move the main body toward a target object under a condition that the contact force detected by the contact force detecting unit is in a predetermined range.

Mobile robot and method for controlling mobile robot

A robot controller according to an embodiment of the present invention comprises a base; a first link; a first actuator which drives to rotate the first link relative to the base; a first torque transmission mechanism which transmits the torque of the first actuator to the first link at a speed reducing ratio of N; a first angular sensor which detects a rotating angle &#x3b8;of the first actuator; a first angular velocity sensor which detects an angular velocity &#x3c9;of the first link rotating relatively to the base; and a processor which calculates an angle of the first link relatively to the base by using a high frequency content of an integrated value of &#x3c9;and a low frequency content of &#x3b8;*N, the high frequency content being equal to a first frequency or higher and the low frequency content being equal to a first frequency or lower.

Robot controller and robot controlling method

A command executing apparatus includes an executing unit that executes a command indicating process contents of a robot; a suspending unit that suspends execution of the command, when an interrupt command; a resumption condition generating unit that generates a resumption condition for resuming a suspending command; an executed contents generating unit that generates executed contents indicating the process contents executed until the suspending command is suspended; a suspending state holding unit that holds the resumption command and the executed contents in association with the suspending command; a resumption propriety judging unit that judges whether the suspending command is able to be resumed, when the resumption command is obtained; and a resuming unit that indicates the executing unit that the execution of the suspending command is resumed from a point at which the suspending command is suspended, when the suspending command is judged to be able to be resumed.

Apparatus, method and computer program product for executing command

A main control apparatus is connected to a single signal line. A plurality of equipments is respectively connected to a multipoint line. Each multipoint line diverges from the single signal line. The main control apparatus sends a control signal to each equipment through the single signal line using a frequency band. Each equipment receives the control signal from the main control apparatus through the multipoint line using the frequency band. Each equipment is assigned a unique frequency from within the frequency band.

Growing community of inventors

Kanagawa-ken, Japan

Fumio Ozaki