Entegris, Inc.

Smk Corporation

Fumio Nozaki

Hiroshi Suzuki

Takeshi Matsuda

Nobuyuki Mano

Yutaka Shimada

This gas purification filter unit () is provided with: a first elimination unit () that eliminates gas component impurities among the impurities contained in ozone generated from an ozone generating device; and a second elimination unit () that is disposed at a later stage than the first elimination unit and that further eliminates solid particulate impurities from among the impurities from which the gas component has been eliminated. Ozone containing impurities are caused to flow in from the inflow end () of such a gas purification filter unit () and is passed through the first elimination unit () and second elimination unit (), and thus ozone from which impurities have been eliminated is discharged from an outflow end ().

Gas purification filter unit

The present invention provides a filter that can minimize the amount of residual liquid within the housing or container with a simplified construction. The article includes a cylinder portion having a cylindrical internal space with both ends open, a cylindrically formed pleated filterinserted in the internal space of the cylinder portionin contact with the inner wall of the cylinder portionand having upper and lower edges liquid-tightly sealed. A perforate inner coresupports the inner surface of the pleated filter, lower and upper end capsare liquid-tightly bonded to the respective ends of the cylinder portion. A liquid distribution passagecommunicates with gaps between the pleats of the pleated filterfrom the lower portion of the cylinder portion. A liquid feed inletcommunicates with the liquid distribution passageformed between the periphery of the pleated filter and a tapered inner wall surfaceof the cylinder portion. A filtrate liquid withdrawal passagecommunicates with an internal passageof the perforate core, and a filtrate outletcommunicates with the withdrawal passage.

Filter device including pleated filter incorporated in a housing

A versatile plug which prevents signal and ground wires in pairs from being connected in reversed polarity; prevents short circuits occurring in adjacent lead wires; facilitates lead wire connecting operation; and which allows connection of lead wires of different types, has a pair of plug-side contact terminals contacted by a pair of apparatus-side terminals; a plug housing having an asymmetrical profile in conformity with a configuration of an apparatus-side connection recess; and a clamp detachably attached to each of the lead wires. By inserting the plug into the connection recess, the paired lead wires can be electrically connected to the paired apparatus-side terminals. Since the plug housing has an asymmetrical configuration, no reversed polarity connection occurs. A lead wire of any given thickness can be connected to the plug-side contact terminal by clamping with the clamp.

Plug

A sleeve terminal includes elastic spring pieces cantilevered inside a housing about a plug insertion hole. The sleeve terminal elastically urges an electrode, on a plug inserted in the plug insertion hole, into stable electrical connection with a circuit. A plate portion of the sleeve terminal includes a first contact projection. A second and third contact projection are on each spring piece. During insertion, the spring pieces elastically urge the electrode into contact with each contact projection, eliminating a separate sleeve piece, and provide stable elastic electrical connection to the plug.

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Tokyo, Japan

Fumio Nozaki