Ulvac, Inc.

Fumio Nakamura

Masanobu Hatanaka

Michio Ishikawa

Se-Ju Lim

Yoshikazu Takahashi

The object of this invention is to provide a method for producing a component for vacuum apparatus and a resin coating forming apparatus capable of easily forming a resin coating on an internal flow path complex in shape. The resin coating forming apparatus () comprises a monomer vapor supplying unit (), a vacuum pumping line () for transporting monomer vapor, a connection portion () connectable with the internal flow path of a component (A) provided on part of the vacuum pumping line (), and a temperature adjusting unit () for depositing the monomer vapor onto the internal flow path of the component (A) connected with the connection portion () to form a resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the component (A) by merely exposing the internal flow path to monomer vapor.

Method for producing component for vacuum apparatus, resin coating forming apparatus and vacuum film forming system

A vacuum film-forming apparatus comprising substrate stages; vacuum chamber-forming containers opposed to the stages; a means for moving the substrate between the stages; and gas-introduction means connected to every containers, wherein one of the stage and the container is ascended or descended towards the other to bring the upper face of the stage and the opening of the container into contact with one another so that vacuum chambers can be formed and that a raw gas and/or a reactant gas can be introduced into each space of the chamber through each gas-introduction means to carry out either the adsorption or reaction step for allowing the raw gas to react with the reactant gas. The apparatus permits the independent establishment of process conditions for the adsorption and reaction processes and the better acceleration of the reaction between raw and reactant gases to give a film having excellent quality and the apparatus can be manufactured at a low cost.

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Shizuoka-ken, Japan

Fumio Nakamura