Fujinon Corporation

Fumio Kobayashi

Kunihiko Tanaka

Zongtao Ge

A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle between a reference surface of the interferometer apparatus and the leading end face at each of two rotational positions, and measures the inclination of the axis of the columnar member by using a predetermined arithmetic expression according to thus detected two angles.

Sample inclination measuring method

In an inclination adjusting apparatus comprising two base members opposing each other, an adjusting screw for relatively inclining the two base members with respect to each other is rotatably threaded into and held by one of the two base members while projecting a leading end part from the one base member toward the other base member. The other base member is provided with a sphere-bearing surface opposing the leading end part of the adjustment screw. A rigid spherical member is held between the adjustment screw and the sphere-bearing surface.

Inclination adjusting apparatus, ferrule clamping apparatus, and interferometer apparatus equipped with them

While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.

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Saitama, Japan

Fumio Kobayashi