Seiko Epson Corporation

Fumio Ichikawa

Ryuta Nishizawa

Keiichi Yamaguchi

Atsushi Matsuo

Keiji Nakagawa

Takayuki Kikuchi

Yoichi Okumura

A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Physical quantity detecting device, electronic apparatus, and moving object

In order to provide a resonator element having high production efficiency and low impedance in a small size, the resonator element includes a base portion, and a driving arm which extends from the base portion and includes a through hole, in which the driving arm vibrates along an in-plane direction, and includes a plurality of broad portions of which a width in the in-plane direction is broad and a plurality of narrow portions of which a width in the in-plane direction is narrow which alternate with each other, and the through hole is disposed in the broad portion.

Resonator element, gyro sensor element, electronic device, electronic apparatus, and moving object

A vibrator element including: a base portion; vibrating arms which extend from the base portion; a first drive section and a second drive section, and a first detecting section and a second detecting sensor which are respectively provided in the vibrating arms; adjusting arms which extend from the base portion in parallel to the vibrating arms; and a first adjusting section and a second adjusting section which are respectively provided on a principal surface of the adjusting arms, wherein, in the first adjusting section and the second adjusting section, a first electrode, piezoelectric layers, and adjustment electrodes are laminated on the first principal surface to be formed, and output signals of the first adjusting section and the second adjusting section are in antiphase to charges generated by the first detecting section and the second detecting section when no angular velocity is added to the vibrating arms.

Vibrator element, method of manufacturing vibrator element, angular velocity sensor, electronic device, and moving body

A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.

Angular velocity sensor and method of manufacture

A physical quantity detection element includes a base part, a first connection part and a second connection part respectively extending from the base part in opposite directions to each other along the X-axis, a pair of first drive vibrating arm and second drive vibrating arm and a pair of third drive vibrating arm and fourth drive vibrating arm respectively extending from the first connection part or the second connection part in opposite directions to each other along the Y-axis, a first drive detection vibrating arm and a second drive detection vibrating arm obliquely extending from the first connection part, a third drive detection vibrating arm and a fourth drive detection vibrating arm obliquely extending from the second connection part, and a first detection vibrating arm and a second detection vibrating arm respectively extending from the base part in opposite directions to each other along the Y-axis.

Physical quantity detection element, physical quantity detection device, and electronic apparatus

A sensor element includes a base part, drive vibration armsand, adjustment vibration arms-that vibrate in response to drive vibration of the drive vibration armsand, detection electrodes that output a charge according to a physical quantity applied to the drive vibration armsand, first adjustment electrodes provided on the adjustment vibration armsandand electrically connected to the detection electrodes for outputting a charge in response to vibration of the adjustment vibration armsand, and second adjustment electrodes provided on the adjustment vibration armsandand electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the first adjustment electrodes in response to vibration of the adjustment vibration armsand

Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus

A sensor element includes a base part, drive vibration arms that extend from the base part, an adjustment vibration armthat extends from the base part and vibrates in response to drive vibration of the drive vibration arms, detection electrodes that output a signal according to a physical quantity applied to the drive vibration arms, and adjustment electrodesandprovided on the adjustment vibration armand electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the detection electrodes in response to vibration of the adjustment vibration arm. The adjustment electrodehas a common partelectrically connected to the detection electrodes and a plurality of branch partsbranching out from the common partand arranged side by side along an extension direction of the adjustment vibration arm

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Suwa, Japan

Fumio Ichikawa