Toflo Corporation

Fumikazu Tamura

Kenji Yamamoto

Shinji Tobimatsu

Masatoshi Nakamura

A flow rate control device capable of suppressing overshoot while improving responsiveness at the beginning of flow rate control includes: a flow rate meter that measures a flow rate of a fluid flowing through a flow path; a flow rate regulating valve that regulates the flow rate of the fluid flowing through the flow path; and a control part that controls an opening degree of the flow rate regulating valve based on a measurement result of the flow rate meter, the flow rate control device has: a low flow rate rapid valve opening function that accelerates an outflow of the fluid by forcibly opening the opening degree of the flow rate regulating valve from fully closed degree to a designated opening degree when the opening degree of the flow regulating valve is fully closed and a flow rate control is started; and an overshoot suppressing function that is used for suppressing the overshoot by making the flow rate control stand by until a preset standby time or a preset flow rate threshold is reached immediately after the low flow rate rapid valve opening function works.

Flow rate control device

Provided is a flow rate control device capable of improving accumulated flow rate error. The flow rate control device of the present disclosure includes: a flow rate meter that measures a flow rate of a fluid flowing through a flow path; a flow rate regulating valve that regulates the flow rate of the fluid flowing through the flow path; and a control part that controls an opening degree of the flow rate regulating valve based on a measurement result of the flow rate meter, includes: a closing function that controls the opening degree of the flow rate regulating valve with an instantaneous flow rate value and closes with a set accumulated flow rate value; and an accumulated value prediction function that monitors the current opening degree of the flow rate regulating valve and the instantaneous flow rate value all the time, and starts a closing operation of the flow rate regulating valve at a time point when the accumulated flow rate value reaches an early closing flow rate value.

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Tokyo, Japan

Fumikazu Tamura