Mitsubishi Chemical Corporation

Tohoku University

Seiko Epson Corporation

Nihon Ceratec Co., Ltd.

Fumikazu Mizutani

Yasuhiro Kawase

Makoto Ishikawa

Yasuyuki Shirai

Makoto Ue

Masafumi Kitano

Hitoshi Morinaga

Tadahiro Ohmi

Hiroshi Takaha

Sachie Takeuchi

Takashi Inoue

Takumi Seki

Mitsuru Ueda

Takeyoshi Ushiki

Shoichiro Mori

Takako Takahashi

Manabu Hayashi

Tomohide Murase

Toshiaki Sakakihara

Sachie Sekigawa

Shoji Yamaguchi

Yu Shoji

Keiko Nishioka

Yukio Kishi

A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cmor less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.

Metal oxide film, laminate, metal member and process for producing the same

A liquid crystal polyimide, containing: repeating units of formula (I) and having liquid crystallinity, wherein Aand Aare each independently a tetravalent residue of a tetracarboxylic acid, Bis a residue of a bis(amino) polysiloxane of formula (II), and Cis a residue of an organic diamine, wherein Rto Rare each independently a lower alkyl group, x is from 0 to 10, Dis an alkylene group, y is 0 or 1, and Zis selected from the group consisting of &#x2014;H, &#x2014;CH, CF, &#x2014;F, &#x2014;CN and &#x2014;NO. In addition, a liquid crystal resin composition and a resin film for a semiconductor element containing the liquid crystal polyimide.

Liquid crystal polyimide, liquid crystal resin composition containing same, and resin film for semiconductor elements

A protective film structure of a metal member for use in an apparatus for manufacturing a semiconductor or the like, the protective film structure including a first coating layer of faultless aluminum oxide formed by direct anodic oxidation of a base-material metal of an aluminum alloy; and a second coating layer formed on the first coating layer and made of yttrium oxide by a plasma spraying method.

Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure

A high-quality oxide film which is free from a pinhole and surface roughing caused by anodic oxidation and which has surface smoothness on a surface of a material to be treated containing a metal as a principal component. An electrolyte solution which is used for forming an oxide film on a surface of a material to be treated containing a metal as a principal component by anodic oxidation, the electrolyte solution containing a non-aqueous solvent containing an alcoholic hydroxyl group and having 4 or more carbon atoms as a main solvent. This non-aqueous solvent preferably contains two or more alcoholic hydroxyl groups and is especially preferably one or two or more members selected from the group consisting of diethylene glycol, triethylene glycol and polyethylene glycol. A method of forming an oxide film including a step of anodically oxidizing a material to be treated containing a metal as a principal component in this electrolyte solution.

Method of forming oxide film by anodically oxidizing in an electrolyte solution

A gold plating solution comprising iodide ions, gold iodide complex ions and a non-aqueous solvent, which is less toxic and stable, while having a performance comparable to a cyanide type gold plating solution. The present invention further provides a gold plating solution comprising iodide ions, gold iodide complex ions, a non-aqueous solvent and a water-soluble polymer, which is less toxic and stable, while having a performance comparable to a cyanide type gold plating solution and which is capable of forming a gold plating film in which gold crystal particle sizes are very fine and grain boundaries are dense. The present invention further provides a gold plating method employing such a gold plating solution.

Gold plating solution and gold plating method

A non-aqueous electrolyte comprises an organic solvent and a solute, and also has an electrolytic conductivity that is greater than or equal to 1 mS/cm but less than or equal to 100 mS/cm. This solute preferably includes at least one of a carboxylate and a salt of inorganic oxoacid. In addition, the non-aqueous electrolyte preferably comprises water in a proportion of 1 to 10 wt %. In an MIM nonlinear element ( ), an insulated film ( ) is formed by anodic oxidation using the above non-aqueous electrolyte. In addition, the insulated film comprises at least one of carbon atoms and atoms of families 3 to 7 that were originally the central atoms of the salt of inorganic oxoacid, and has a relative permittivity of 10 to 25. With this MIM nonlinear element, the capacitance is sufficiently small, the steepness of the voltage-current characteristic is sufficiently large, and also the resistance is sufficiently uniform over a wide area.

Method of fabricating two-terminal nonlinear element using non-aqueous electrolyte

Disclosed is a forming electrolyte for forming metal oxide coating films which comprises one or more kinds of solutes selected from the group consisting a salt of inorganic acid and salt of organic carboxylic acid dissolved in a solvent having analcoholic hydroxyl group or aprotic organic solvent, provided that, when the solvent having an alcoholic hydroxyl group is selected, the salt of organic carboxylic acid is selected from salts of aromatic carboxylic acids, salts of aliphatic polycarboxylic acid having 3-5 carbon atoms with no hydroxyl groups, salts of monohydroxy carboxylic acid having 2-5 carbon atoms, and salts of amino acid. By anodically oxidizing metal using the forming electrolyte, there can be formed an oxide coating film of high insulation property with a high throughput, in which hillocks are effectively suppressed.

Forming electrolyte for forming metal oxide coating film

Non-aqueous solvent secondary battery electrode material and process for

A composite oxide film which comprises at least one oxide of a metal selected from the group consisting of Al, Ti, Zr, Hf, Nb, and Ta, said oxide containing ions of an organic carboxylic acid salt and/or ions of an inorganic oxoacid salt.

High-permittivity composite oxide film and uses thereof

Growing community of inventors

Fukuoka, Japan

Fumikazu Mizutani