Kabushiki Kaisha Yaskawa Denki

Fumihiro Tara

Yoshiaki Kubota

Masafumi Tamai

Ryuichirou Tominaga

Takao Fujii

Nobuyuki Furukawa

Kensuke Ohni

A first decelerator is placed in an arm base such that a lower end of a decelerator shaft is bared in the arm base. A first arm has a hermetic space which becomes equal in pressure to a hermetic space of the arm base when an upper end of the hollow decelerator shaft is inserted thereinto, and is secured to a first decelerator output shaft. A second decelerator is placed on a distal end of the first arm, and has an input shaft connected to the decelerator shaft. A second arm is secured to an output shaft of the second decelerator, and has no hermetic space formed therein. A link mechanism follows the first and second arms.

Arm mechanism, and vacuum robot provided with the same

A small and high rigid linear motor (), wherein a tabular heat pipe () is disposed between a plurality of coil rows forming an armature coil () along the longitudinal direction of an armature () with a part of the heat absorbing part of the heat pipe () fixed to the armature coil () and the heat radiating part thereof inserted into a refrigerant passage (), a block-shaped locking member () for fixing the heat pipe () to a frame () is installed between the portion of the heat pipe () for fixing the armature coil thereto and the portion thereof inserted into the refrigerant passage (), and a hollow recessed part () forming the refrigerant passage () and allowing die insertion of the heat radiating part of the heat pipe () therein and a locking step part () allowing the locking of the frame () to the locking member () installed on the heat pipe are provided in the frame (), whereby the heat of the armature coil can be efficiently transferred to the frame, and the thrust of a rotor can be prevented from lowering according to a rise of temperature of the armature coil.

Linear motor

Growing community of inventors

Fukuoka, Japan

Fumihiro Tara