Tokyo Electron Limited

Fumihiro Miyazaki

Kazuhito Miyazaki

Wataru Yoshitomi

Koutarou Onoue

Norihide Sagara

A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.

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Kumamoto, Japan

Fumihiro Miyazaki