Sumitomo Mitsubishi Silicon Corporation

Mitsubishi Jidosha Kogyo Kabushiki Kaisha

Juki Corporation

Fumihiko Yoshida

Toru Taniguchi

Shinichi Sakamoto

Seiji Harada

Isoroku Ono

Takayuki Shiina

Etsuro Morita

Satoshi Matagawa

Mitsuhiro Endo

Hidetaka Inagaki

Yasushi Ono

Toshiya Shimpo

A method of manufacturing a semiconductor wafer, including a step of differentiating the glossiness of a front surface from that of a rear surface of the wafer by holding the semiconductor wafer in a wafer holding hole formed in a carrier plate, and simultaneously polishing a front and back surface of said semiconductor wafer by driving said carrier plate to make a circular motion associated with no rotation on its own axis within a plane parallel with a surface of said carrier plate between a pair of polishing members disposed to face to each other, by using an abrasive body with a semiconductor wafer sink rate different in polishing from that of an abrasive body for one of a polishing member on an upper surface plate and a polishing member on a lower surface plate so as to simultaneously polish both the front and rear surfaces of the semiconductor wafer, or differentiating by differentiating the rotating speed of the upper surface plate from that of the lower surface plate.

Method of manufacturing semiconductor wafer

A method of manufacturing a semiconductor wafer, comprising the step of differentiating the glossiness of a front surface from that of a rear surface of the wafer by using an abrasive cloth with a semiconductor wafer sink rate different in polishing from that of the other abrasive cloth for one of a polishing cloth () on an upper surface plate () and a polishing cloth () on a lower surface plate () so as to simultaneously polish both the front and rear surfaces of the semiconductor wafer (W), or differentiating by differentiating the rotating speed of the upper surface plate from that of the lower surface plate.

A door member opener apparatus for a vehicle includes an engaging mechanism, a lock mechanism, a clearing mechanism, and an ECU (electronic control unit). The engaging mechanism includes a striker and a claw member that rotatively moves to engage with the striker. The engaging mechanism engages a tailgate with a car body. The lock mechanism regulates rotative movement of the claw member. The clearing mechanism clears the regulation of the rotative movement of the claw member when a handle member is operated. The ECU sets the amount of time before the lock mechanism can regulate the rotative movement of the claw member equal to a normal driving time.

Door member opener apparatus for vehicle

Growing community of inventors

Tokyo, Japan

Fumihiko Yoshida