Other

Fujitsu Corporation

Fujitsu Vlsi Limited

Fujitsu Limited & Fujitsu Vlsi Limited

Fumihiko Inoue

Hiroshi Nomura

Motoo Nakano

Masaya Katayama

Toshimi Ikeda

Masahiro Kuwamura

Junichi Ishikawa

Masayuki Tanaka

The method for fabricating the semiconductor device comprises the step of: forming a gate insulation film on a semiconductor substrate ; forming a semiconductor layer containing boron on the gate insulation film ; forming a silicon nitride film having an Si&mdash;H bond concentration in the film immediately after deposited which is below 4.3&times;10 cm measured by FT-IR; and patterning the silicon nitride film and the semiconductor layer to form a gate electrode of a semiconductor layer having the upper surface covered by the silicon nitride film . Whereby the release of hydrogen in the films in the thermal processing after the silicon nitride film has been formed can be decreased, and the boron penetration from the p-type gate electrode can be suppressed.

Method for fabricating semiconductor device

Microstructures, including a plurality of spaced structural members which are bendable under an external force, undergo a treating method using a first treating liquid, to prevent permanent deformation, by removing the microstructure from the first treating liquid to an environment having a pressure less than atmospheric pressure; or moving the microstructure from the first treating liquid to a second treating liquid having a smaller surface tension than the first treating liquid, and then removing the microstructure from the second liquid; or drying the microstructure removed from the first treating liquid by exposing same to a liquid vapor having a smaller surface tension than the first treating liquid; or removing the microstructure from the first treating liquid to the atmosphere, and drying the microstructure using an energy beam of high intensity or an ultrasonic wave.

Method of liquid treatment of microstructures comprising bendable structural members

A micro-structure including at least a first bendable member having first and second ends and being supported at the first end only, and either being spaced from a rigid component, or being spaced from a second bendable member also supported only at a first end thereof. The first member has a length L from the first end to the second end specified by one of the following equations: (a) for the first member adjacent to the rigid component: L&lt;(2Edt.sup.3 /3P).sup.1/4, wherein E is a Young's modulus of a material of the first member; d is a distance of the space between the first member and the rigid component; t is a thickness of the first member; and P is an external pressure applied to the first member; or b) for the first member adjacent to the second member: L&lt;(2Ed't.sup.3 /3P).sup.1/4, wherein E, t and P are as defined above; and d' is a distance of the space between the first and second members.

Micro-structures having structural members capable of withstanding

Micro-structures comprising at least a structural member, which is liable to be bent under an external force and formed so as to leave a space between the member and another member liable to be bent and/or other rigid component, are successfully treated using a treating liquid, without suffering permanent deformation resulting from the use of the treating liquid, by removing the micro-structures from the liquid to an environment having a pressure less than the atmospheric pressure; or displacing the micro-structures from the treating liquid to another treating liquid having a smaller surface tension than that of the former liquid, and then removing the micro-structures from the latter liquid; or drying the micro-structures removed from the treating liquid by exposing the same to vapor of a liquid having a smaller surface tension than that of the treating liquid; or removing the micro-structures from the treating liquid to the atmosphere, and drying them using an energy beam of high intensity or an ultrasonic wave. Micro-structures are also disclosed which comprise at least a member liable to be bent but are capable of avoiding permanent deformation of the member resulting from a treatment using a liquid.

Method of liquid treatment of micro-structures comprising structural

Growing community of inventors

Kawasaki, Japan

Fumihiko Inoue