Sumco Corporation

Fumie Yoshida

Toshiaki Sudo

Ken Kitahara

Tadahiro Sato

Eriko Kitahara

Makiko Hinooka

Akihiro Aiba

Kazushi Ousyuya

The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress.

Vitreous silica crucible for pulling of silicon single crystal and method for manufacturing the same

Growing community of inventors

Akita, Japan

Fumie Yoshida