Spansion Llc.

Fumiaki Toyama

Fumihiko Inoue

Yukihiro Utsuno

Shin Iwase

Yoshihiro Mikasa

Takaya Tabuchi

An embodiment of the invention includes a semiconductor device including a semiconductor substrate with a trench; a tunnel insulating film covering an inner surface of the trench; a trap layer in contact with the tunnel insulating film on an inner surface of an upper portion of the trench; a top insulating film in contact with the trap layer; a gate electrode embedded in the trench, and in contact with the tunnel insulating film at a lower portion of the trench and in contact with the top insulating film at the upper portion of the trench, in which the trap layer and the top insulating film, in between the lower portion of the trench and the upper portion of the trench, extend and protrude from both sides of the trench so as to be embedded in the gate electrode, and a method for manufacturing thereof.

Semiconductor device and method for manufacturing thereof

A method for manufacturing a semiconductor device is disclosed. The method includes forming a shallow trench isolation (STI) region extending in a first direction on a semiconductor substrate, forming a mask layer extending in a second direction that intersects with the first direction on the semiconductor substrate and forming a trench on the semiconductor substrate by using the STI region and the mask layer as masks. In addition, the method includes forming a charge storage layer so as to cover the trench and forming a conductive layer on side surfaces of the trench and the mask layer. Word lines are formed from the conductive layer on side surfaces of the trench that oppose in the first direction by etching. The word lines are separated from each other and extend in the second direction.

Semiconductor device and method for manufacturing

A semiconductor device is disclosed. The semiconductor device includes a plurality of memory cells provided in a matrix and having a charge storage layer, a plurality of word lines provided on the charge storage layer, and an application section. When reading data from a selected memory cell selected from the plurality of memory cells, the application section applies a voltage having an opposite polarity to the voltage applied to a selected word line to non-selected word lines arranged on both adjacent sides of the selected word line.

Semiconductor device and method for controlling

A semiconductor device is disclosed. The semiconductor device includes a plurality of memory cells that are provided in a matrix and that have a charge storage layer made of an insulating film that is provided on a semiconductor substrate and a plurality of word lines that are provided on the charge storage layer. A plurality of memory cells that are arranged in a single line among the plurality of memory cells arranged in the matrix are coupled to the same word line. The semiconductor device further includes an application section that when reading data from a selected memory cell selected from the plurality of memory cells, applies a voltage to a selected word line to be coupled to the selected memory cell among the plurality of word lines. The application section applies a voltage that has a polarity that is opposite to the voltage applied to the selected word line to non-selected word lines arranged on both adjacent sides of the selected word line.

The present invention provides a semiconductor device including a semiconductor substrate provided with a trench section; a tunnel insulating film covering an inner surface of the trench section; a trap layer provided in contact with the tunnel insulating film on an inner surface of an upper portion of the trench section; a top insulating film provided in contact with the trap layer; a gate electrode embedded in the trench section, and provided in contact with the tunnel insulating film at a lower portion of the trench section and in contact with the top insulating film at the upper portion of the trench section, in which the trap layer and the top insulating film, in between the lower portion of the trench section and the upper portion of the trench section, extend and protrude from both sides of the trench section so as to be embedded in the gate electrode, and a method for manufacturing thereof.

A semiconductor device and a method for manufacturing thereof are provided. The semiconductor device includes: an ONO film including a charge storage layer on a semiconductor substrate; a plurality of bit lines each extending inside the semiconductor substrate; a plurality of interspaces each interposed between the adjacent bit lines; a plurality of gates each provided along the bit line on the ONO film above the interspaces; and a plurality of word lines electrically coupled with the corresponding gates formed on one of the interspaces, each extending to intersect with the bit lines. The two gates adjacent with each other in a width direction of the bit line are connected to different word lines.

Mirror bit memory device applying a gate voltage alternately to gate

A semiconductor device and a method for manufacturing the semiconductor device is disclosed. The semiconductor device includes a bit line formed to extend into a semiconductor substrate, a charge storage layer formed on the semiconductor substrate, a word line formed above the charge storage layer to extend across the bit line, a gate electrode formed on the charge storage layer under the word line and between bit lines, a first insulating film formed over the bit line and to extend in the direction of the bit line and a second insulating film that includes a different material than that of the first insulating film and formed to adjoin a side surface of the first insulating film. In addition, the semiconductor device includes an interlayer insulating film that includes a different material from that of the second insulating film that is formed on the first insulating film and the second insulating film and a contact plug coupled to the bit line and formed to penetrate through the first insulating film and the interlayer insulating film and to be sandwiched by the second insulating film.

Growing community of inventors

Fukushima-ken, Japan

Fumiaki Toyama