Tokyo Electron Limited

Fumiaki Nagai

Eiji Kikama

Nobutoshi Terasawa

Masayuki Kitamura

Shingo Hishiya

Noriaki Koyama

Kazuo Yabe

Tatsuya Miyahara

Tomoyuki Nagata

Motoshi Fukudome

Takehiro Kinoshita

Yuki Tanabe

Hiroaki Kikuchi

Tomonori Yamashita

Takazumi Tanaka

Kazuaki Sasaki

An abnormality detection method includes: supplying a gas controlled to a selected rate to a gas supply pipe via the gas pipe connected to the gas supply pipe, thereby introducing the gas into a reaction region of a processing container provided in a processing apparatus from a gas hole of the gas supply pipe; measuring a pressure inside the gas pipe by a pressure gauge attached to the gas pipe; and detecting an abnormality of at least one of the gas supply pipe and the gas pipe based on the pressure measured at the measuring.

Abnormality detection method and processing apparatus

A substrate processing system includes: an acquiring unit configured to acquire process data of each step when each step included in a predetermined process is executed under different control conditions; an extracting unit configured to divide each step into a first section in which the process data fluctuates and a second section in which the process data is converged, and extract first data belonging to the first section and second data belonging to the second section from the process data; and a monitoring unit configured to monitor the process data by comparing one or both of an evaluation value that evaluates the first data and an evaluation value that evaluates the second data with corresponding upper and lower limit values.

Substrate processing system and method for monitoring process data

Growing community of inventors

Hokkaido, Japan

Fumiaki Nagai