Renesas Electronics Corporation

Floadia Corporation

Fukuo Owada

Yasuhiro Taniguchi

Shinji Yoshida

Yasuhiko Kawashima

Daisuke Okada

Shoji Yoshida

Kosuke Okuyama

Kazumasa Yanagisawa

Yutaka Shinagawa

Shinichiro Abe

Masaaki Shinohara

Takahiro Maruyama

Hideo Kasai

Takafumi Kato

Satoshi Noda

Seiji Muranaka

Ryotaro Sakurai

Hideaki Yamakoshi

Tatsuro Toya

Takanori Yamaguchi

Teruo Hatada

Tetsuya Muraya

Kazuharu Yamabe

Toshio Kudo

When a memory cell (MC) is downsized by reducing the distance between a drain region () and a source region () on the surface of a fin (S) with a high impurity concentration inside the fin (S), the shape of the fin (S) can be set such that a potential difference between a memory gate electrode (MG) and the fin (S) is reduced to suppress the occurrence of disturbance. Accordingly, the memory cell (MC) achieves downsizing and suppression of the occurrence of disturbance.

Memory cell, nonvolatile semiconductor storage device, and method for manufacturing nonvolatile semiconductor storage device

A memory cell includes a memory gate structure, a first select gate structure, and a second select gate structure. In the memory gate structure, a lower memory gate insulating film, a charge storage layer, an upper memory gate insulating film, and a metal memory gate electrode are stacked in this order. The first select gate structure includes a metal first select gate electrode along a first sidewall spacer provided on a sidewall of the memory gate structure. The second select gate structure includes a metal second select gate electrode along a second sidewall spacer provided on another sidewall of the memory gate structure. Thus, the metal memory gate electrode, the metal first select gate electrode, and the metal second select gate electrode can be formed of a same metallic material as a metal logic gate electrode, permitting the memory cell to be formed together with the metal logic gate electrode.

Memory cell, semiconductor integrated circuit device, and method for manufacturing semiconductor integrated circuit device

A memory cell and a non-volatile semiconductor memory device are disclosed. Nitride sidewall layers are respectively disposed in a first sidewall spacer and a second sidewall spacer, to separate a memory gate electrode and a first select gate electrode from each other and the memory gate electrode and a second select gate electrode from each other. Hence, a breakdown voltage is improved around the memory gate electrode as compared with a conventional case in which the first sidewall spacer and the second sidewall spacer are simply made of insulating oxide films. The nitride sidewall layers are disposed farther from a memory well than a charge storage layer. Hence, charge is unlikely to be injected into the nitride sidewall layers at charge injection from the memory well into the charge storage layer, thereby preventing an operation failure due to charge storage in a region other than the charge storage layer.

Memory cell and non-volatile semiconductor storage device

A semiconductor integrated circuit device includes first and second select gate electrodes that are sidewall-shaped along sidewalls of a memory gate structure. With this configuration, the memory gate structure is not disposed on the first select gate electrode and the second select gate electrode. Accordingly, the memory gate structure the first select gate structure, and the second select gate structure can have equal heights, thereby achieving reduction in size as compared to a conventional case. In addition, a silicide layer on the first select gate electrode and a silicide layer on the second select gate electrode can be separated farther from a memory gate electrode by the thickness of a cap film. Accordingly, the silicide layers on the first select gate electrode and the second select gate electrode are unlikely to contact with the memory gate electrode, thereby preventing a short-circuit defect of the memory gate electrode.

In a semiconductor memory device, voltage application from a memory gate electrode of the memory capacitor to a word line can be blocked by a rectifier element depending on values of voltages applied to the memory gate electrode and the word line without using a conventional control circuit. The configuration eliminates the need to provide a switch transistor and a switch control circuit for turning on and off the switch transistor as in conventional cases, and accordingly achieves downsizing. In the semiconductor memory device, for example, each bit line contact is shared by four anti-fuse memories adjacent to each other and each word line contact is shared by four anti-fuse memories adjacent to each other, thereby achieving downsizing of the entire device as compared to a case in which the bit line contact and the word line contact are individually provided to each anti-fuse memory.

Semiconductor memory device

An improvement is achieved in the performance of a semiconductor device. Over a first insulating film formed over a main surface of a semiconductor substrate located in a memory formation region and having an internal charge storage portion and over a second insulating film formed over the main surface of the semiconductor substrate located in a main circuit formation region, a conductive film is formed. Then, in the memory formation region, the conductive film and the first insulating film are patterned to form a first gate electrode and a first gate insulating film while, in the main circuit formation region, the conductive film and the second insulating film are left. Then, in the main circuit formation region, the conductive film and the second insulating film are patterned to form a second gate electrode and a second gate insulating film.

Method of manufacturing semiconductor device with separately formed insulating films in main circuit and memory regions

To provide a semiconductor device having mix-loaded therein a nonvolatile memory cell and a field effect transistor at a reduced cost. A method of manufacturing a semiconductor device includes pattering a conductor film by using an additional mask that covers a gate electrode formation region of a memory formation region and exposes a main circuit formation region (field effect transistor formation region) and thereby forming a gate electrode of a nonvolatile memory cell in the memory formation region and then forming an ntype semiconductor region of the nonvolatile memory cell in a semiconductor substrate by ion implantation using the above-mentioned additional mask without changing it to another one.

Method of manufacturing a nonvolatile memory cell and a field effect transistor

To provide a semiconductor device having improved performance while improving the throughput in the manufacturing steps of the semiconductor device. An insulating film portion comprised of first, second, third, fourth, and fifth insulating films is formed on a semiconductor substrate. The second insulating film is a first charge storage film and the fourth insulating film is a second charge storage film. The first charge storage film contains silicon and nitrogen; the third insulating film contains silicon and oxygen; and the second charge storage film contains silicon and nitrogen. The thickness of the third insulating film is smaller than that of the first charge storage film and the thickness of the second charge storage film is greater than that of the first charge storage film. The third insulating film is formed by treating the upper surface of the first charge storage film with a water-containing treatment liquid.

Method of manufacturing semiconductor device

To provide a semiconductor device with nonvolatile memory, having improved performance. A memory cell has control and memory gate electrodes on a semiconductor substrate via an insulating film and another insulating film having first, second, and third films stacked one after another in order of mention, respectively. The memory and control gate electrodes are adjacent to each other via the stacked insulating film. The second insulating film has a charge accumulation function. The first and third insulating films each have a band gap greater than that of the second insulating film. An inner angle of the second insulating film between a portion extending between the semiconductor substrate and the memory gate electrode and a portion extending between the control gate electrode and the memory gate electrode is &#x2267;90&#xb0;. An inner angle of the corner portion between the lower surface and the side surface of the memory gate electrode is &#x3c;90&#xb0;.

Semiconductor device and method of manufacturing same

A first ReRAM unit having a resistance change layer is provided between a first access transistor configuring the SRAM and a first bit line, and a second ReRAM unit having a resistance change layer is provided between a second access transistor and a second bit line. When a low potential (L=0V) is held at a first storage node and a high potential (H=1.5V) is held at a second storage node at the end of a normal operation period of the SRAM, the first ReRAM unit is set to ON state (ON), and the second ReRAM unit is set to OFF state (OFF); accordingly, the retained data of the SRAM is written in to the ReRAM units. When the SRAM returns to the normal operation again, data corresponding to the storage nodes are written back and the ReRAM units are both set to ON state (reset).

A contactless IC card which ensures the reliability of an IC chip mounted therein. Even if the distance between the contactless IC card and a reader/writer is too short, the card prevents an excessive voltage from being applied to the IC chip so that breakdown or reliability deterioration of the circuitry of the IC chip does not occur. The body of the contactless IC card has two interconnection substrates stacked between two external sheets. A first antenna coil formed on one interconnection substrate and a second antenna coil formed on the other interconnection substrate are opposite in winding direction. The number of turns of the second antenna coil is larger than that of the first antenna coil. Therefore, when the IC card comes close to the reader/writer, the voltage between two terminals of the IC chip is always smaller than the voltage induced in the second antenna coil.

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Kodaira, Japan

Fukuo Owada