Mitutoyo Corporation

Fujio Maeda

Shozaburo Tsuji

Toshihiko Aoki

Miyako Mizutani

Kimitoshi Ono

Michihiko Togashi

Provided are a light source device that can achieve higher accuracy while maintaining reliability by reducing stray light, and a photoelectric encoder including the same. A light source deviceincludes a translucent memberconfigured to accommodate a light emitting unitthereinside, and to make light emitted from the light emitting unitinto parallel light. The translucent memberincludes an optical axis planean orthogonal planea reflection portion configured to make light from the light emitting unitinto parallel light, and a connection portionformed by the optical axis planeand the orthogonal planeconnecting to each other, and having a curved surface. A central axis AX of the curved surface is in an outside region of the translucent memberand a region between the optical axis planeand the orthogonal plane

Light source device and photoelectric encoder including the same

An induction type position measuring apparatus includes a scale and a sensor. The scale includes a track having a plurality of control patterns provided at equal intervals along a measurement reference line to control flow of an induced current, and a first edge portion and a second edge portion located on both sides of the measurement reference line. The sensor is provided to be capable of moving relatively to the scale along the measurement reference line to detect an induced current. The scale includes regulation patterns at least between the track and the first edge portion or between the track and the second edge portion to regulate a flow of an induced current.

Induction type position measuring apparatus

A linear encoder includes a plate-type scale and a head which moves along the longitudinal direction of the scale. The scale has graduations formed on a surface of the scale and arranged along the longitudinal direction of the scale. The head includes a reading part which detects an amount of a relative movement of the head with respect to the scale by reading graduations formed on the scale. The head includes four bearings each having a rotation axis extending along the transverse direction of the scale. Each of the bearings is situated on the head so as to abut against a surface of the scale, to function as a spacer to maintain a distance between the scale and the head. The scale acts as a plate member interposed between the reading part and the graduations.

Linear encoder

A scale for a photoelectric encoder includes a scale substrate and a reflection film formed at a predetermined pitch on the scale substrate. A surface of the reflection film forms a reflection surface. A low-reflection surface is formed by etching the scale substrate between reflection films. Accordingly, a scale can be provided which is lower in cost and has favorable yield rates.

Scale for photoelectric encoder

A scale of a photoelectric encoder includes a base member and gratings on the base member. The gratings can be formed on the surface of the base member by plating and arranged at a prescribed pitch on the base member. The surface of the base member is a roughened surface which is roughened by sandblasting or with a chemical. The gratings are light absorptive gratings or light reflective metal gratings.

Scale of photoelectric encoder including base member having roughened surface and manufacturing method of scale

A surface reflection encoder scale is used with a surface reflection encoder for detecting a relative movement amount of a member for making a relative move. The surface reflection encoder scale includes a substrate of the member or a substrate provided on the member and a reflection phase grating provided on the substrate and having asperities for changing a phase of reflected diffracted light on its surface. The asperities of the phase grating are formed of a deposition film of metal silicide and chromium.

Surface reflection encoder scale and surface reflection encoder using the same

This invention relates to a digital display type measuring instrument. In a case, a pair of scales including a main scale and an index scale are provided, the index scale is fixed in the case and the main scale is slidably supported by a guide provided in the case. A spindle is supported by the case in a manner to be movable in the axial direction thereof. One end of the spindle is provided with a measuring element, and the other is located within the case and is engaged with the bottom end portion of the main scale provided in the case. The main scale is constantly biased toward the spindle by a biasing device in a manner to be operationally associated with the other end of the spindle.

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Kanagawa, Japan

Fujio Maeda