Chinese Academy of Sciences

Fuhua Yang

Xiaodong Wang

Jinmin Li

Liangchen Wang

Guohong Wang

Fabrication method of GaN power LED with electrodes formed by composite optical coatings, comprising epitaxially growing N&#x2014;GaN, active, and P&#x2014;GaN layers successively on a substrate; depositing a mask layer thereon; coating the mask layer with photoresist; etching the mask layer into an N&#x2014;GaN electrode pattern; etching through that electrode pattern to form an N&#x2014;GaN electrode region; removing the mask layer and cleaning; forming a transparent, electrically conductive film simultaneously on the P&#x2014;GaN and N&#x2014;GaN layers; forming P&#x2014;GaN and N&#x2014;GaN transparent, electrically conductive electrodes by lift-off; forming bonding pad pattern for the P&#x2014;GaN and N&#x2014;GaN electrodes by photolithography process; simultaneously forming thereon bonding pad regions for the P&#x2014;GaN and N&#x2014;GaN electrodes by stepped electron beam evaporation; forming an antireflection film pattern by photolithography process; forming an antireflection film; thinning and polishing the backside of the substrate, then forming a reflector thereon; and completing the process after scribing, packaging and testing.

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Beijing, China

Fuhua Yang