United Microelectronics Corp.

Fu-Yang Yu

Chien-Hsin Lai

Peng-Yih Peng

Juen-Kuen Lin

Huang-Yi Lin

Jung-Nan Tseng

Kun-Lin Wu

Chao-Yang Tang Chen

Hao-Kuang Chiu

Li-Min Chang

Edward Yang

Cheng-Chi Hsieh

A pressure suppression device for a chemical mechanical polishing machine. The chemical mechanical polishing machine includes a polishing table and a polishing head. The polishing table has a polishing pad and a polishing gas input through which a polishing gas is charged. The polishing head holds a wafer and has a wafer gas input through which a wafer gas is charged. The pressure suppression device has a pressure releasing component and a gas input tube coupled to the wafer gas input and the pressure releasing component. When a polishing pressure applied to the polishing pad is smaller than a wafer pressure applied to the wafer, the pressure releasing component releases a part of the wafer pressure until the wafer pressure is smaller than the polishing pressure. As a result, this prevents the wafer slippage or broken wafer that occur when the wafer is blown off from the polishing head by too much wafer pressure.

Pressure suppression device for chemical mechanical polishing machine and method thereof

A controlled pressure regulation system generates the wafer-pressing pressures during a polishing operation. A wafer carrier head holds a wafer to be polished against a platen. A first and second pressure regulators respectively generate a first and second pressure onto the platen and the wafer carrier head to press the wafer to be polished. A first and second controllers are respectively connected to the first and second pressure regulators in control feedback loops to control the generation of the first and second pressures. The first and second pressures are controlled to obtain a desired difference of pressure between the first and second pressure.

Wafer pressure regulation system for polishing machine

An auxiliary gasline-heating unit is used in a chemical vapor deposition apparatus. The auxiliary gasline-heating unit serves to increase the exit temperature of the mixture of N gas and He-dilute gas in order to prevent TDMAT, Ti&lsqb;N(CH ) &rsqb; , from being condensed and becoming a gasline contaminant when the mixture mixes with the TDMAT and a carrier gas.

Auxiliary gasline-heating unit in chemical vapor deposition

An auxiliary gasline-heating unit is used in a chemical vapor deposition apparatus. The auxiliary gasline-heating unit serves to increase the exit temperature of the mixture of N,gas and He-dilute gas in order to prevent TDMAT, Ti&lsqb;N(CH,),&rsqb;,, from being condensed and becoming a gasline contaminant when the mixture mixes with the TDMAT and a carrier gas.

A chemical mixer tank calibrator and a calibrating method for the same. The chemical mixer tank calibrator calibrates the weight of the mixer tank through a step motor. Once the chemical in the mixer tank is used up, the mixer tank can be automatically filled with chemical. Thus, the chemical in the mixer tank can adequately supply the buffer tank and the machine at any given time.

Chemical mixer tank calibrator and calibrating method for the same

A method to maintain a consistent thin film thickness deposited by chemical vapor deposition is described in which method a compensative coefficient K is provided. The initial preset deposition time T,is multiplied by the compensative coefficient K to obtain an actual deposition time T, where T&equals;K&times;T,. Using the actual deposition time T to conduct the deposition, the expected thickness of the thin film is obtained.

Method to maintain consistent thickness of thin film deposited by chemical vapor deposition

A chemical-liquid controlling apparatus is described. The chemical-liquid controlling apparatus is mounted between a chemical-liquid container and an exhaust apparatus. During a chemical-liquid refilling process, once the chemical liquid is drawn out of the container by the exhaust apparatus, the chemical liquid first enters the chemical-liquid controlling apparatus. The chemical-liquid controlling apparatus separates the chemical liquid from a nitrogen gas and a chemical gas. In addition, the chemical-liquid refilling process is stopped by a signal transmitted from a leak sensor.

Chemical-liquid controlling apparatus

A gas tube with heating apparatus. The gas tube is applicable in a chemical vapor deposition machine. The gas comprises a gas circulating tube and a coaxial gas tube invaginating a gas transporting tube therein. A heater is installed in the gas circulating tube, while the coaxial tube is covered by a thermal insulating layer. In addition, a control valve, a pressure gauge, and a particle trap are installed in a gas supplying tube connecting with the gas circulating tube.

Gas tube with heating apparatus

The invention provides a chemical-mechanical polishing pad, which includes a plurality of annular grooves and a plurality of streamline grooves designed according to principles of the hydrodynamics. The streamline grooves of polishing pad are designed according to flow equations derived from source flow and vortex flow, and the streamline grooves of polishing pad uniformly distribute the slurry on the polishing pad. An angle and a depth of the streamline groove, which are calculated by boundary layer effect of the streamline groove function, are used to design an optimum structure for polishing pad.

Chemical-mechanical polishing pad

A novel process for depositing amorphous silicon has been described. The process features the homogeneous reaction of, decomposition of SiH2 and deposition of amorphous silicon, in a horizontal LPCVD reaction chamber. The SiH2 is produced by initially breaking down SiH4 in a heated autoclave apparatus, and then transferring the SiH2 to the LPCVD system through heated feed lines. This homogeneous process results in excellent thickness and resistivity uniformity for wafers placed along the horizontal axis of the LPCVD chamber.

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Hsinchu, Taiwan

Fu-Yang Yu