National Science Council

National Kaohsiung First University of Science and Technology

Fu-Der Lai

Jiann-Kuo Wu

The present invention discloses a HT-AttPSM (high-transmittance attenuated phase-shift mask) blank with phase-shifters composed of the (AlO)/(TiO)superlattice film stacks, wherein x preferably ranges 79&#x2dc;84%. Particularly, the four-stacked superlattice films of the present invention perform superior optical properties including transmittance of 19.9% and a reflectance of 3.2% at the wavelength of 193 nm and an inspection transmittance less than 20% at the wavelength of 257 nm.

High-transmittance attenuated phase-shift mask blank

The adhesive strength and hardness of chromium nitride(CrN) film deposited on SKD 61 tool steel was significantly enhanced by a nitriding process on the surface the tool steel before coating with a CrN film. These nitriding processes included nitrocarburing, gas nitriding, and plasma nitriding, respectively. After nitriding, the surface of tool steel was repolishing with grits #600, #1000, #1800 of SiC grinding paper, as well as #1000 grinding paper and diamond paste, respectively. After repolishing, the CrN film was deposited by the cathodic arc ion plating deposition process at low temperatre of 200.degree. C. The present invention was related to the process modification for enhancing the adhesive strength and surface hardness of CrN film deposited on tool steels. This method included a nitriding process and a repolishing followed by the cathodic arc ion plating deposition.

Method of surface modification for tool steels

A cyaniding process, operating in a molten cyanide salt, and a nitriding process, operating in a Tufftride salt bath, can be utilized to modify the near-surface microstructure of Ti-6Al-4V alloy. The surface-hardened layers have been characterized with respect to their hardness and microstructure. The corrosion and wear performance can be both improved by cyaniding and nitriding.

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Taipei, Taiwan

Fu-Der Lai