Leybold-heraeus Gmbh

Leybold-heraeus Gmbh & Co. Kg

Leybold-hereaus Gmbh

Friedrich Stark

Hans Aichert

Herbert Stephan

Otto-Horst Hoffmann

Walter Dietrich

Uwe Reimpell

Reinhard Reiter

Lutz Grein

Walter Heil

Alfred Hauff

A pendulum gate valve with a pressure tight housing and inlet and outlet openings arranged on opposite sides of the housing. The drive rod for the pendulum frame is guided throughout its total path by a joint connected to the pendulum frame which can swivel about the shaft of the pendulum frame but can in addition also move independently of the swiveling motion of the pendulum frame. A guide mechanism is provided for the further movement of the joint outside the swiveling range, which forces the joint onto a path that runs substantially parallel to the drive rod. The guide mechanism consists of a thrust rod forming part of the pressing device which urges the gate valve plate against the sealing bearing surface and which is connected to the drive rod. The thrust rod is mounted in a longitudinally movable manner in the pendulum frame and runs parallel to the drive rod in the closed position of the gate valve plate.

Pendulum gate valve

Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.

Coupling for stationary and movable vacuum chambers

Method and apparatus for vacuum depositing thin films on substrates which are located above 500.degree. C. by electron beam heating during the deposition. The substrates are positioned above an evaporating crucible filled with a bath of the material being evaporated which is also heated by electron beams. The electron beams are deflected at an angle of less than 80.degree. onto approximately one-half of the bath surface situated between the axis of symmetry and the end of the evaporating crucible.

Method and apparatus for vacuum depositing thin coatings using electron

Method for vacuum depositing corrosion and oxidation resistant alloy coatings on turbine buckets having leading edges and trailing edges, with simultaneous rotation of the turbine buckets about their longitudinal axis in a vapor stream above a vapor source. The time of stay of each element of the surface above the vapor source is varied during a 360.degree. rotation such that it is shortest when the leading edges and the trailing edges are pointed towards the vapor source and longest when the concave and convex flanks are presented to it.

Method for vapor-coating turbine buckets

Pass-through heating device for vacuum coating apparatus having a heating chamber with at least one heating device, a thermal barrier positioned between the walls of the heating chamber and the heating device parallel to the longitudinal axis of the coating apparatus.

Heating system for vacuum coating apparatus

An operating mechanism for valves and the like comprises a housing with a port situated therein which is to be opened and closed. Associated with the port is a seat and a valve plate for closing the port. A rotatable shaft drive mechanism for the valve plate includes a shaft which rotates in one direction to effect movement of the valve plate from its open position to its closed position followed by a pressing movement over the valve plate against the seat and rotates in the other direction to effect movement of the valve plate in the opposite direction. The rotatable shaft drive mechanism includes an intermittent drive for the transformation of the rotatory movement of the shaft to the desired movement of the valve plate.

Operating mechanism for valves, gates and the like

Vacuum apparatus for coating substrates by rotation including a vacuum chamber with an elongated material source having a longitudinal axis and a transverse axis, a substrate rack with a plurality of fastening points for the planar arrangement of a plurality of substrates above the material source in a substantially uniform distribution over its surface and a drive associated with the substrate rack for rotating substrates. The substrate rack has to parallel substrate bearers disposed fork-wise with couplings for the substrates positioned on the confronting inner sides of the substrate bearers. The substrate bearers are connected by angle drives to the substrate couplings and a motor via a drive shaft.

Vacuum coating apparatus

Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.

Growing community of inventors

Langenselbold, Germany

Friedrich Stark