Vat Holding Ag

Other

Siegfried Schertler

Innotrade Entwicklungs- Und Vertriebsgesmbh

Friedrich Geiser

Bernhard Duelli

Thomas Blecha

Anton Neumeier

Florian Ehrne

Anton Neumeir

Rico Rohner

Christof Bachmann

Karlheinz Summer

Berhard Duelli

Cedric Wagner

Rene Brulc

Herwig Vonbank

Wilhelm Erhard

A valve (), in particular a vacuum valve, with at least one closure member () which has a wedge-shaped closure region (), and with at least one valve seat () which surrounds a valve opening () of the valve (), wherein, in a closed position of the closure member (), the wedge-shaped closure region () bears sealingly against the valve seat () and closes the valve opening () and, in an open position, opens up the valve opening () so that fluids and/or solids can be transported through the valve opening (), wherein the closure member () with the wedge-shaped closure region () is mounted so as to be movable back and forth between the closed position and the open position along a movement path (), wherein the movement path () is angled-off and/or bent.

Valve, in particular a vacuum valve

A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement

Valve (), in particular vacuum valve, having a passage opening () and a closure member (), it being possible for the closure member () to be moved by a valve drive () of the valve () in a closing direction () from an open position, in which it releases the passage opening (), into a closed position, in which it closes the passage opening (), and in the reverse direction. The closure member () is arranged in the closed position between two valve seats () which lie opposite one another and surround the passage opening (), and a first closure member part () of the closure member () bears against a first of the valve seats () in the closed position and a second closure member part () bears against the second valve seat () in the closed position. The closure member parts () are mounted such that they can be displaced relative to one another in the closing direction ().

Gate valve with linearly displaceable closing members

A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam, which can be pivoted via a pivoting bearing between a closed and open position. A shaft can be rotated by a drive and is operatively connected to the valve closure beam such that rotation of the shaft causes the valve closure beam to pivot. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. First arms are arranged on the shaft to provide a force to the rear face of the valve closure beam to pivot the valve closure beam. According to one development of the invention, the valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing, wherein the shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing.

Flap transfer valve with pivoting bearing

A flap transfer valve is disclosed. An elongated first opening can be closed by elongated valve closure beam pivoted between a closed position and an open position. A shaft can be rotated about a shaft axis by a drive and is operatively connected to the valve closure beam to cause the valve closure beam to pivot. The valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing. The shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis.

Flap transfer valve with valve cover

A door for sealing an opening () in a wall () of a vacuum chamber () relative to the atmosphere includes a sealing element (), which is attached to at least one rod (&#x2033;) and which can be moved between an open position, in which the sealing element releases the opening (), an intermediate position, in which the sealing element covers the opening () but is raised from a seat () surrounding the opening (), and a closed position, in which the sealing element is pressed against the seat (), a door body (), which carries the at least one rod (&#x2033;) and the sealing element () and which can be tilted about a tilt axis () relative to the wall () in order to move the sealing element () between the intermediate position and the closed position, and at least one tilting actuator ('), which has an inner cavity () into which a compressed gas can be introduced in order to tilt the door element () about the tilt axis (). At least one wall () of the tilting actuator (&#x2032;) bounding the inner cavity () is elastic and/or flexible at least over a section of the extent of the wall.

Door for sealing an opening

A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane.

Flap transfer valve with pivotable valve closure beam

A method for controlling or regulating a vacuum valve that includes: a valve body () with a valve opening (); a closing member () that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening () in the closed position, in which at least one elastic seal () is pressed onto a seal face (); an actuator () for moving the closing member (); and a control device () by which the actuator () can be triggered; the point (p) of the closing path (s) at which the elastic seal () contacts the seal face () and/or a velocity (v) of the closing member () at that point is used as a controlling parameter for the control device ().

Method for controlling or regulating a vacuum valve

A vacuum chamber system for semiconductor processing includes at least two evacuable vacuum chambers for receiving semiconductor elements to be processed, each including a vacuum chamber opening and a vacuum chamber sealing surface, and transfer aspects by which one of the vacuum chambers can be moved relative to another of the vacuum chambers and can be docked with it in a vacuum-tight manner by producing substantially parallel opposite positions of the vacuum chamber sealing surfaces which are subject to possible misalignments. At least one of the vacuum chambers has support aspects which support one vacuum chamber on the other vacuum chamber in the evacuated, docked state. The support aspects are in the form of two support elements which are arranged on opposite sides of the vacuum chamber opening, are substantially parallel to the opening central axis and have an operative connection to one another and have a force and displacement balance relative to one another with a balance center located substantially on the opening central axis, so that, in the docked state non-parallel positioning of the vacuum chamber sealing surfaces opposite one another, caused by possible misalignments, is compensated on support.

Vacuum chamber system for semiconductor processing

The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing () having a first wall () which has a first opening () and a first valve seat (), a valve plate () having a closing side () with a first sealing ring () and at least one drive (). By action of the drive (), the valve plate () is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (), and the perpendicular distance between the valve plate (), and the first valve seat () can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the first sealing ring () and the first valve seat (). The valve plate () includes support part (), which is connected to the drive () and fixes the first sealing ring () in the perpendicular direction to the first valve seat (), and a sealing part () which has an inner circumferential area () and which is mounted so as to be movable relative to the support part () in a direction (Z) essentially perpendicular to the first valve seat (). The inner circumferential area () encloses the first sealing ring () in an essentially gastight way with an inner seal. Thus, in the closed position (C), a pressure difference at the valve plate () acts essentially on the sealing part () so that sealing part (), decoupled from the support part (), is supported perpendicularly on a section of the valve housing (), in particular the first valve seat () or a lateral groove ().

Pendulum and slide gate vacuum valve

The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing () having a first wall () which has a first opening () and a first valve seat (), a valve disk () having a closing side () with a sealing ring () and at least one drive (). Through drive (), the valve disk () is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (), and the perpendicular distance between the valve disk (), and the first valve seat () can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring () and the first valve seat (). The valve disk () includes an outer disk section (), which is connected to the drive () and fixes the sealing ring () in the perpendicular direction to the first valve seat (), and an inner disk section () which has an outer circumferential area () and which is mounted so as to be movable relative to the outer disk section () in a direction (Z) essentially perpendicular to the first valve seat (). The outer circumferential area () is enclosed essentially gastight with an inner seal by the sealing ring (). Thus, in the closed position (C), a pressure difference at the valve disk () acts essentially on the inner disk section () so that the inner disk section (), decoupled from the outer disk section (), is supported perpendicularly on a section of the valve housing (), in particular the first valve seat () or a lateral groove ().

Valve essentially gastight closing of a flow path

A curve-tilting vehicle, e.g., a three-wheeled vehicle (), including a laterally tilting device () at least one section () of the vehicle by a tilting axis () that runs substantially parallel to the longitudinal axis () of the vehicle such that the center of gravity of the vehicle can be displaced perpendicular to the direction of travel when driving, especially in curves or on a sloped or uneven ground. The vehicle includes at least one vehicle seat () that is disposed in the tilting section () of the vehicle and is allocated to the driver who steers the vehicle. The vehicle further includes a detector () for detecting a lateral force of the seat, which the body of the driver applies at least to one zone of the vehicle seat () in a lateral direction () extending perpendicular to the direction of travel. The lateral force of the seat may be detected using a pivotal spring-centered vehicle seat (). The detector () is effectively connected to the lateral tilting includes () in such a way that lateral tilting occurs in accordance with the detected lateral force of the seat while the tilting speed is a function at least of the lateral force of the seat and the vehicle speed, the tilting speed increasing as the lateral force of the seat rises at a factor that decreases as the speed of the vehicle goes up. The invention further relates to a method for tilting such a vehicle.

Multitrack curve-tilting vehicle, and method for tilting a vehicle

A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of opening and closing the vacuum valve, is rotatable around its longitudinal axis and displaceable in axial direction, and a driving device for opening and closing the vacuum valve. The driving device comprises a rotary drive for rotating the shaft. The driving device further comprises a driving piston which is arranged in an inner cavity of the valve disk and which has, at least over portions of its circumference, a radial extension which is larger than the outlet opening with respect to the center longitudinal axis of the outlet opening and at which tappets are arranged on the side facing the outlet opening. The tappets are guided out of the inner cavity of the valve disk and are supported in the closed position of the valve disk at the valve housing in the area next to the outlet opening and press the valve disk against the valve seat and can be lifted from the valve housing for displacing the valve disk from its closed position into its intermediate position by means of a displacement of the driving piston. At least one spring element displaces the valve disk into its intermediate position by an axial displacement of the shaft.

Vacuum valve

The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (a) having a first wall () which has a first opening () and a first valve seat (), a valve disk () having a closing side () with a sealing ring () and at least one drive (). Through the drive (), the valve disk () is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (), and the perpendicular distance between the valve disk (), and the first valve seat () can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring () and the first valve seat (). The valve disk () includes an outer disk section (), which is connected to the drive () and fixes the sealing ring () in the perpendicular direction to the first valve seat (), and an inner disk section () which has an outer circumferential area () and which is mounted so as to be movable relative to the outer disk section () in a direction (Z) essentially perpendicular to the first valve seat (). The outer circumferential area () is enclosed essentially gastight with an inner seal by the sealing ring (). Thus, in the closed position (C), a pressure difference at the valve disk () acts essentially on the inner disk section () so that the inner disk section (), decoupled from the outer disk section (), is supported perpendicularly on a section of the valve housing (), in particular the first valve seat () or a lateral groove ().

Valve for essentially gastight closing a flow path

A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum chambers is determined by the control unit and the magnitude of the pressing force acting on the seal in the closed state of the vacuum valve is controlled by the control unit depending on the determined differential pressure by controlling the at least one actuator.

Growing community of inventors

Nueziders, Austria

Friedrich Geiser