Forschungszentrum Julich Gmbh

Forschungszentrum Juelich Gmbh

Friedhelm Finger

Reinhard Carius

Stefan Klein

Yaohua Mai

Andreas Schmalen

Johannes Wolff

A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber.

Hot-wire method for depositing semiconductor material on a substrate and device for performing the method

A thin film solar cell is disclosed comprising the following layers deposited on a substrate:

Method for producing a thin-film solar cell by use of microcrystalline silicon and a layer sequence

The invention relates to a method for production of a thin-layer solar cell with microcrystalline silicon and a layer sequence. According to the invention, a microcrystalline silicon layer is applied to the lower p- or n-layer in pin or nip thin-layer solar cells, by means of a HWCVD method before the application of the microcrystalline i-layer. The efficiency of the solar cell is hence increased by up to 0.8% absolute.

Growing community of inventors

Juelich, Germany

Friedhelm Finger