Tel Nexx, Inc.

Seagate Technology Incorporated

Freeman Fisher

Arthur Keigler

Daniel Goodman

Jonathan Haynes

David G Guarnaccia

Stanislaw Dobosz

Gerry Woods

Techniques herein provide a workpiece handling and loading apparatus for loading, unloading, and handling relatively flexible and thin substrates for transport and electrochemical deposition. Such a system assists with workpiece holder exchange between a delivery cartridge or magazine, and a workpiece holder. Embodiments include a workpiece handler configured to provide an air cushion to a given workpiece, and maneuvering to a given workpiece holder that can edge clamp the workpiece.

Workpiece loader for a wet processing system

A system for processing surfaces of substrates having a process module having a process module frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A plurality of substrate holder assemblies, each having a number of substrate holders, each of which is removably coupled to the process module frame, each substrate holder configured to hold a substrate. The process module frame has alignment features aligning the substrate holders in the substrate holder assembly in repeatable alignment with respect to each of the process elements with each of the process elements located between the substrates. A loader module is configured to unload processed substrates from each of the substrate holder assemblies and load unprocessed substrates to each of the substrate holder assemblies. A transporter is configured to transport the substrate holder assemblies to and from the process module and the loader module.

Parallel single substrate processing system

A system for fluid processing substrate surfaces arrayed in a fluid having a process section with a frame having a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A substrate holder assembly having a holder frame and a number of substrate holders, each of which is coupled to the holder frame and is configured for holding a substrate so that each substrate holder holds a different substrate for transport as a unit with the substrate holder assembly to and from the process section. The substrate holder assembly and each substrate holder are removably coupled to the process section frame, and the substrate holders of the substrate holder assembly are movable relative to the holder frame and positionable in repeatable alignment with respect to a predetermined feature of the process section and independent of positioning of the holder frame with respect to the process section.

A substrate separation chuck which is adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.

Substrate loader and unloader having an air bearing support

A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.

Substrate loader and unloader

A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.

Substrate loader and unloader having a Bernoulli support

The present disclosure provides an apparatus for mounting an object to a base. In one example, the apparatus includes a base and a protuberant feature extending from the base. The protuberant feature includes a datum surface sized to matingly engage a corresponding surface of an object to precisely position the object with respect to the base.

Locating feature for mounting a component to a base

The present invention is a device for increasing the stiffness of a pivot bearing assembly generally employed along with an actuator assembly of a magnetic disk drive. More specifically, bearing cartridges generally used in the art, are modified with a smaller spacer and a stiffener that is associated with the shaft. This modification reduces the rotating mass of the actuator assembly and increases the stiffness of the pivot assembly about which it rotates, thereby yielding greater system performance by increasing a critical resonance mode frequency.

Stiffened shaft bearing cartridge

A method is provided for maintaining the aggregate stiffness of a pivot bearing assembly generally employed along with an actuator assembly of a magnetic disk drive, while increasing the stiffness in a predetermined direction. More specifically, bearing cartridges used in conjunction with actuator assemblies of the prior art employ at least one ball bearing assembly positioned about a stationary shaft. A modification is presented herein that generally concerns repositioning and maintaining the balls of the ball bearing along a predetermined axis for efficient reaction of loads.

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Charlestown, MA, United States of America

Freeman Fisher