Average Co-Inventor Count = 1.33
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Micronic Laser Systems Ab (1 from 109 patents)
2. Micronic Mydata Ab (1 from 26 patents)
3. Mycronic Ab (58 patents)
2 patents:
1. 8137875 - Method and apparatus for overlay compensation between subsequently patterned layers on workpiece
2. 7919218 - Method for a multiple exposure beams lithography tool