Kla Corporation

Capres A/s

Frederik Westergaard Osterberg

Ole Hansen

Dirch Hjorth Petersen

Alberto Cagliani

Kristoffer Gram Kalhauge

Mikkel Fougt Hansen

To measure the resistance area product of a high resistivity layer using a microscopic multi point probe, the high resistivity layer is sandwiched between two conducting layers. A plurality of electrode configurations/positions is used to perform three voltage or resistance measurements. An equivalent electric circuit model/three layer model is used to determine the resistance area product as a function of the three measurements.

Method for measuring high resistivity test samples using voltages or resistances of spacings between contact probes

The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.

Position correction method and a system for position correction in relation to four probe resistance measurements

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Hellerup, Denmark

Frederik Westergaard Osterberg