Kla Corporation

Frederik Westergaard Østerberg

Alberto Cagliani

Ole Hansen

Peter Folmer Nielsen

Dirch Hjorth Petersen

Henrik Hartmann Henrichsen

Chia-Hung Wei

A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.

Probe for testing an electrical property of a test sample

The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.

Method for measuring an electric property of a test sample

Growing community of inventors

Kongens Lyngby, Denmark

Frederik Westergaard Østerberg