Silverbrook Research Pty Ltd

Frederik Jacobus Clous

Kia Silverbrook

Samuel George Mallinson

Angus John North

Paul Justin Reichl

Jennifer Mia Fishburn

Roger Mervyn Lloyd Foote

Alexandra Artemis Papadakis

Paul David Lunsmann

Matthew Stewart Walker

Channarayapatna Shankar Lakshmi

A MEMS vapor bubble generator includes a chamber for holding liquid; and a heater positioned in the chamber, the heater being formed using a sputtering technique. The heater is formed from a superalloy material. The superalloy material of the heater is in direct contact with the liquid, without any intervening protective coating. The superalloy has a crystalline structure with a grain size less than 100 nano-meters. The superalloy is MCrAlX, where M is one or more of Ni, Co, Fe with M contributing at least 50% by weight, Cr contributing between 8% and 35% by weight, Al contributing more than zero but less than 8% by weight, and X contributing less than 25% by weight, with X consisting of zero or more other elements, preferably including but not limited to Mo, Re, Ru, Ti, Ta, V, W, Nb, Zr, B, C, Si, Y, Hf.

MEMS bubble generator incorporating superalloy heater in direct contact with bubble formation liquid without intervening protective coating

Growing community of inventors

Balmain, Australia

Frederik Jacobus Clous