Bruker Nano Gmbh

Frederik Büchau

Detlef Knebel

Tilo Jankowski

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.

Measuring device for a scanning probe microscope and method for scanning probe microscopy of a measurement sample by means of a scanning probe microscope

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Berlin, Germany

Frederik Büchau