Coherent, Inc.

Frederick W Hauer

Patrick T Tracy

Joel Fontanella

R Russel Austin

Leon A Newman

Christian J Shackleton

David Schmelzer

W Shef Robotham, Jr

Vernon A Seguin

Gongxue Hua

Adrian Papanide

Thomas V Hennessey, Jr

Howard L Knickerbocker

Thomas J Hennessey, Jr

An RF power-supply for driving a carbon dioxide COgas-discharge laser includes a plurality of power-oscillators phase-locked to a common reference oscillator. Outputs of the phase-locked power-oscillators are combined by a power combiner for delivery, via an impedance matching network, to discharge-electrodes of the laser. In one example the powers are analog power-oscillators. In another example, the power-oscillators are digital power-oscillators.

Multiple phase-locked loops for high-power RF-power combiners

Radio-frequency (RF) power supply apparatus for supplying RF power to discharge electrodes of a gas-discharge laser includes a plurality of amplifier modules each having an RF output. A power combining arrangement is provided for combining the amplifier module RF-outputs into a single combined RF-output connected to the discharge electrodes. A DC power supply is connectable to or disconnectable from each of the transistor amplifier modules, separately, to allow current drawn by any of the amplifier modules to be monitored by a single current sensor.

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Electrical apparatus for connecting a radio frequency power-supply having two outputs to a load includes two radio frequency transmission-lines, each one connected to a corresponding power-supply output. A transformer arrangement connects the two transmission-lines to the load. Each transmission-line includes a series-connected pair of twelfth-wave transmission-line sections. The series-connection between the twelfth wave transmission-line sections in one transmission line is connected to the series-connection between the twelfth-wave transmission-line sections in the other by a device having an adjustable impedance.

In a COgas discharge laser energized by a radio frequency (RF) power source a transformer having selectively variable output impedance is used to match output impedance of the power source to the impedance of discharge electrodes of the laser. A similar transformer can be used to impose a selective variable phase-shift on the RF power from the source. The variable impedance transformer can also be used for impedance matching between amplifier stages in the power source.

RF power is transmitted to a COgas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.

Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

An RF power combiner used to combine an output received from a plurality of power amplifiers. The combined output is used to operate a gas discharge laser. In some embodiments, the power combiner consists of a network of transformers that provide an output to a load. In other embodiments, the power combiner consists of a plurality of transmission lines that are connected to a common connection point.

Power combiner

An RF impedance-matching transformer for matching the output impedance of an RF amplifier to the discharge of a gas-discharge laser includes upper and lower dielectric plates arranged face-to-face and bonded together. A primary U-shaped strip winding is embedded in the bonded surface of one of the dielectric plates. A secondary strip-winding is formed on an exposed surface of the upper dielectric plates. A ground-plane electrode formed on an exposed surface of the lower dielectric plate. An electrical connector connects one end of the secondary strip-winding to the ground-plane electrode via a via-hole extending through the dielectric plates. The other end of the secondary strip-winding can be connected to the laser.

Transformer for impedance-matching power output of RF amplifier to gas-laser discharge

A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power COslab lasers. The feed-through mechanically obtains RF contact, preferably, at the center of the length of the electrodes that are inserted within the long laser housing, thereby making it easier to obtain a uniform electric field distribution along the length of the electrodes.

High power low inductance RF hermetic sealed feed-through for slab CO2 lasers

A RF shielded, series inductor, high power impedance matching network interconnector is provided for connecting an RF power supply to electrodes contained in the shielded, hermetically sealed laser tube housing of a slab laser system. The impedance matching interconnector comprises a short length of co-axial conductor and an impedance matching network that includes two L shaped networks. The inner conductor of the co-axial conductor is connected between the power supply output and the impedance matching network. The outer conductor of the co-axial conductor is grounded. The co-axial conductor has an impedance characteristic to match the power supply output impedance. The first L-shaped network includes a first inductor having a first end connected to the inner conductor of the co-axial conductor and a first capacitor connected to the second end of the first inductor and a second plate connected to ground. The second L shaped network includes a second inductor having a first end connected to the common connection between the second end of the first inductor and the first plate of the first capacitor and a second capacitor having a first plate connected to the second end of the second inductor and a second plate connected to ground. The common connection between the second end of the second inductor and the first plate of the second capacitor is connected through the shielded, hermetically sealed laser tube housing to the electrodes of the slab laser system. The two L-shaped networks may be implemented in a 'single capacitor' configuration for lower power applications or in a 'multi-capacitor' configuration for higher power applications.

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Windsor, CT, United States of America

Frederick W Hauer