United Technologies Corporation

Asml Netherlands B.v.

Asml Holding N.v.

Frederick Kubick

Peter Conrad Kochersperger

Hendrikus Robertus Marie Van Greevenbroek

Lester H Kosowsky

Richard Carl Zimmerman

Todd R Downey

Elizabeth Stone

Szilard Istvan Csiszar

Olga Vladimirsky

A lithographic apparatus including a uniformity correction system is disclosed. Fingers move into and out of intersection with a radiation beam to correct an intensity of the radiation beam. Actuating devices are coupled to the fingers. A width of a tip of each of the fingers is half that of a width of the actuating devices. Systems and methods compensate for uniformity drift. An illumination slit uniformity caused by system drift is measured. First positions of uniformity compensators are determined based on the uniformity. Uniformity compensators are moved to the first respective positions. A substrate is exposed.

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

An arrangement for modifying impressed radars signals with an internally generated signal to establish a misrepresentative return signal which is confusing as to actual range, size and position.

Ferroelectric panel

A scanner (13) of ferroelectric material (17) for redirecting the orientation of a beam (22) of millimeter wavelength radiation. The scanner (13) includes parallel input and output sides with matching layers (44). Adjacent and opposite parallel wire grid electrodes (31') are addressed with progressive voltage difference excitation levels across the face of the ferroelectric material in order progressively to modify the refractive index distribution of the scanner and thereby conduct effective beam steering.

Electro-optic beam scanner

A ferroelectric switchable bandwidth filter device for operation at millimeter wavelengths applicable for use as a component in radar systems. Electrode pairs pulse switch fields reversibly to flip-flop the optic axes of the ferroelectric material in several stages of the device from one domain state to the other.

Switchable bandwidth filter

A scanner (13) of ferroelectric material (17) for redirecting a beam (22) of millimeter wavelength radiation. The scanner (13) includes parallel input and output sides with matching layers (44). Adjacent and opposite parallel wire grid electrodes (31') are addressed with opposite sense voltage pulses in order to redirect the domain orientation of crystals in selected regions of said ferroelectric material (17).

Poled domain beam scanner

A ferroelectric focussing and defocussing device for operation at millimeter wavelengths applicable for use as a component in radar systems. Electrodes direct fields reversibly and continuously modify the refractive character of the ferroelectric material of the device as incoming radiation seeks to proceed along the optic axis of the material. The device includes first and second material media sharing complementary sides with Fresnel contours.

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Redding, CT, United States of America

Frederick Kubick