Amkor Technology, Inc.

Frederick Evans Reed

Ronald Patrick Huemoeller

David Jon Hiner

Kiwook Lee

Garry Pycroft

Bob-Shih Wei Kuo

A method includes applying a backside passivation layer to an inactive surface of an electronic component and to enclose a through via nub protruding from the inactive surface. The method further includes laser ablating the backside passivation layer to reveal a portion of the through via nub. The backside passivation layer is formed of a low cost organic material. Further, by using a laser ablation process, the backside passivation layer is removed in a controlled manner to reveal the portion of the through via nub. Further, by using a laser ablation process, the resulting thickness of the backside passivation layer is set to a desired value in a controlled manner. Further, by using a laser ablation process, the fabrication cost is reduced as compared to the use of chemical mechanical polish.

Through via nub reveal method and structure

In accordance with the present invention, there is provided multiple embodiments of a concentrated photovoltaic (CPV) receiver cell or die. In each embodiment of the present invention, the receiver die includes a multiplicity of through wafer vias or TWV's which are etched therethrough to effectively eliminate the bus bars on the top or front surface of the receiver die, connectors such as bus bars instead being effectively moved to the bottom or back surface of the receiver die. The movement of the connectors to the back surface of the receiver die provides the potential for a greater active surface area on the front surface for solar input.

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Raleigh, NC, United States of America

Frederick Evans Reed