Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (2 from 1,787 patents)
2 patents:
1. 9903708 - Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate
2. 9279663 - Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate