L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

L'air Liquide

Frederic Rotman

Philippe Queille

Yannick Rancon

Michel Olivier

Sylvie Mellul

Dominique Navarro

The invention relates to a process for preparing interconnection substrates of hybrid circuits, comprising effecting on a support the deposition of a thick layer of ink or paste based on a non-noble metal, such as copper or other material having a 'copper compatible' formulation, by carrying out in succession a preliminary drying for eliminating solvents at a temperature on the order of 100.degree. C. to 150.degree. C., a firing comprising:

Process for preparing electrical connection means, in particular

Metallization of ceramics of the type comprising depositing a metallic paste based on molybdenum and/or tungsten and manganese on a ceramic substrate and effecting the sintering of the paste in an atmosphere having a predetermiend oxido-reduction potential, with a rise in and a maintenance of a temperature between 1300.degree. C. and 1600.degree. C., then cooling to ambient temperature, with production of an atmosphere by the addition to a pure neutral gas of a quantity of additional oxygen and a quantity of hydrogen at least sufficient to subsequently obtain by catalytic reaction the desired content of water vapour and contingently the excess content of hydrogen.

Process for the metallization of ceramics and apparatus for carrying out

The invention concerns the production of ceramic-metal multilayer components comrising effecting, after making up in the crude state, in particular by metallization and stacking of pre-cut raw ceramic bands, a simultaneous firing operation, termed cofiring, on the components under an atmosphere based on hydrogen or nitrogen or a mixture of hydrogen and nitrogen, having a regulated water vapor content at a temperature of first of all between 800.degree. C. and 1800.degree. C., and more precisely either at a moderately high temperature plateau between 800.degree. C. and 1300.degree. C. for certain ceramic materials such as codierite and metallic materials such as copper and nickel, or at a temperature plateau between about 1400.degree. C. and 1800.degree. C. for refractory materials such as tungsten, molybdenum, alumina, according to which the atmosphere having a water vapor content is obtained by addition to a vector gas at (13) and (14) of a quantity of additional oxygen (15), and a quantity of additional hydrogen at (14) sufficient to obtain by hydrogen-oxidation reaction the predetermined water vapor content, and determining these quantities of addition of oxygen and the contingent addition of hydrogen so that said water vapor content is, in the course of the cofiring, that which is the most appropriate for the different stages of said cofiring.

Process for producing ceramic-metal multilayer components and apparatus

The process comprises, after deposition of a layer of raw ink on a support having a high thermal dissipation, of the aluminium nitride type, effecting a preliminary drying of this ink at a temperature on the order of 100.degree. C. to 150.degree. C., then a firing comprising:

Process for producing electric connecting means, in particular

The invention concerns glass-metal sealing comprising effecting on a metallic piece, in particular an alloy based on iron and nickel or iron, nickel and cobalt, first of all a decarburization under an atmosphere, at a temperature of between 950.degree. C. and 1,150.degree. C., formed by hydrogen (10 to 99%), water vapor (1 to 8%), with a ratio hydrogen/water vapor higher than five, the possible remainder being nitrogen, then an oxidation under an atmosphere formed by an inert vector gas such as nitrogen, either at a temperature of 600.degree. C. to 800.degree. C. and with a water vapor content of 8% to 2%; or at a temperature of 900.degree. C. to 1,100.degree. C. and with a water vapor content of 4% to 0.5%; then establishing the connection. The gas mixture for a treatment atmosphere is obtained by mixing nitrogen and hydrogen conducted through pipes (13, 14), to which oxygen is added through a pipe (15) upstream of a catalytic chamber (11) permitting the elimination of the oxygen and the production of a content of water vapor.

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Tokyo, Japan

Frederic Rotman