Asm America, Inc.

Asm IP Holding B.v.

Fred Pettinger

Eric James Shero

Carl Louis White

Todd Robert Dunn

Kyle Fondurulia

Mike Halpin

Sokol Ibrani

Dave Marquardt

Embodiments related to managing the process feed conditions for a semiconductor process module are provided. In one example, a gas channel plate for a semiconductor process module is provided. The example gas channel plate includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps. The example gas channel plate also includes a heat exchange fluid director plate support surface for supporting a heat exchange fluid director plate above the plurality of heat exchange structures so that at least a portion of the plurality of heat exchange structures are spaced from the heat exchange fluid director plate.

Process feed management for semiconductor substrate processing

Growing community of inventors

Phoenix, AZ, United States of America

Fred Pettinger