3m Innovative Properties Company

Fred E Behr

Richard M Flynn

Michael G Costello

Daniel R Vitcak

John G Owens

Michael J Parent

Richard M Minday

Zhongxing Zhang

Susrut Kesari

Larry A Zazzera

Paul E Rivers

Fire extinguishing compositions and methods for extinguishing, controlling, or preventing fires are described wherein the extinguishing agent is a fluorinated ketone having up to two hydrogen atoms, alone, or in admixture with a co-extinguishing agent selected from hydrofluorocarbons, hydrochlorofluorocarbons, perfluorocarbons, perfluoropolyethers, hydrofluoroethers, hydrofluoropolyethers, chlorofluorocarbons, bromofluorocarbons, bromochlorofluorocarbons, iodofluorocarbons, hydrobromofluorocarbons, and mixtures thereof.

Use of fluorinated ketones in fire extinguishing compositions

Methods of using reactive gases containing a perfluoroketone having 4 to 7 carbon atoms for removing unwanted deposits that build up in a vapor reactor, for etching dielectric and metallic materials in a vapor reactor, and for doping a material in a vapor reactor are described. The perfluoroketones perform as well as or better than the standard perfluorocarbons used in the semiconductor industry but have minimal impact on global warming.

Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases

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Woodbury, MN, United States of America

Fred E Behr